Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

Refer to page 3-13-4.)

VFR

Refer to page 3-13-4.)

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

VFS4000-OMY0001

-1 1.5m VVFS2000-30A-2 3m 206837-11 VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25

Table of Contents

Since there are other applicable auto switches than listed, refer to page 8-23-13 for details.

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Workpiece weight: 0.05 kg 25 20 0.5 Gripping force (N) 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.6 MPa).

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.6 MPa).

MXW

Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Since there are other applicable auto switches than listed, refer to page 8-7-22 for details.

CE

13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

CE

13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Compact Cylinder

14 10 M8 x 1.25 5 8 22 16 13 14 12 M8 x 1.25 5 10 22 16 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10 5 0.8 45 39 10 12 40 5.5 M6 x 1.0 48 10 6 26 4.5 M5 x 0.8 7.5 13 10 5 0.8 6 Series C55 Dimensions 32 to 63 2-G1/8 Port size Auto switch Z Q F 2 x 4-OB counterbore RB H thread effective depth C J

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Mr = 0.2 x 9.8 (40 + 15.5)/1000 = 0.1 A2 = 15.5 Obtain Mar = 13 from Va = 300 in Graph (3). Find the allowable static moment Ma (Nm). Pitch, Yaw moment: Graph (2) Roll moment: Graph (3) 13 Find the load factor 1 of the static moment. Mar Nm 1 = M/Ma 1 = 0.1/13 = 0.008 300 Va mm/s 3-2 Load Factor of Dynamic Moment Find the dynamic moment Me (Nm). Examine Mep.

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

MHC2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHC2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.