ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Hydraulic

22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19 16 M12 x 1.75 27 13 80 231 14 90 139 14 34 M27 x 2 35 32 125

Table of Contents

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

ZP

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Smooth Cylinder/Low Speed Cylinder

flats KA NA L S + Stroke RR ZZ + Stroke Z + Stroke (mm) B1 P RR E H KA L N NA NN U A CI I Z H1 K MM S AL CD ZZ CX D F G FL Bore size (mm) 0 0.033 20 15.5 13 10.5 5 M8 x 1.25 M20 x 1.5 133 142 9 41 6 30 15 24 14 18 24 28 5 62 9 10 8 13 8 20 0 0.033 25 33.5 5.5 M10 x 1.25 19.5 17 10.5 6 M26 x 1.5 137 146 9 45 8 30 15 30 14 22 30 62 9 10 10 13 8 26 0 0.033 32 34.5 37.5 5.5 M10 x 1.25 19.5 17

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

10 12 40 46.5 48.5 54 63.5 75 33 39.5 40.5 46 53.5 63 13 13 15 15 21 27 17 17 22 22 26 26 8 8 10 10 12.5 12.5 64.5 71 86 99 122.5 143.5 30 30 39 39 48 48 Note) External dimensions with rubber bumper are the same as standard type, as shown above.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread 10 13 16 20 25 32 10 20 30 40 50 B5 A10 M5 x 0.8 5 13 8 N S U F GN GS 10 4.5 15 J K ZP T U 10 20 30 50 5 9 B5 M5 x 0.8 40 50 A14 10 B01 N01 T01 16.5 Rc1/8 NPT1/8 NPTF1/8 13 20 30 50 12 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates

Table of Contents

41.5 30 T 1 2 3 8 KQ2L11-13 43 17.9 30 17 25.5 7 21 25 Note) D1: Max. diameter VMG Applicable fitting Extended Male Elbow: KQ2W Applicable tubing O.D.

AC Servo Motor Driver (Network card type ）

13 1 13.

5

19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 D32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39

CQ2

41 55.5 62 77 30 30 39 16 16 20 7 7 8 13 13 15 45 8.5 8.5 11 M8 X 1.25 51.5 56.5 44.5 49.5 11 Depth 8 M10 X 1.5 58.5 50.5 68.5 60.5 Refer to p.2.3-18 for rod end nut and optional bracket.

Made to Order

36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16 16 20 20 11 11 10.5 11.5

AC Servo Motor Driver (Pulse input type/Positioning type ）

USING STO FUNCTION 131 to 13-13 13.

V100

L dimension 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. 20 260.5 L dimension 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No.

Air Cylinder

9 24 25 10 19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

How to Order Connector Assembly 30 4A SY100 For DC: 30 1A SY100 For 100 VAC: 30 2A SY100 For 200 VAC: 30 3A SY100 For other voltages of AC: Caution When making connections, please note that using other than the specified size (3.5 to 7) cabtire cable will not satisfy IP65 (enclosure) standards.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

48.5 54 63.5 75 33 39.5 40.5 46 53.5 63 13 13 15 15 21 27 7 7 8 8 10 12 17 17 22 22 26 26 8 8 10 10 12.5 12.5 64.5 71 86 99 122.5 143.5 30 30 39 39 48 48 Note) External dimensions with rubber bumper are the same as standard type, as shown above.

ZP

) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 16 (17) (16) (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29)

Air Cylinder

(121) 40 Up to 300 301 to 1500 30 27 19 26 16 25 2 13 10 (13) 50 8 47 M6 x 1 depth 12 14 M14 x 1.5 44 1/8 78 (87) 12 10 (12) M10 x 1.25 130 (139) 50 Up to 300 301 to 1500 35 32 27 32 20 30 2 14 12 (14) 58 11 58 M8 x 1.25 depth 16 18 M18 x 1.5 55 1/4 90 (102) 13 12 (13) M12 x 1.25 150 (162) 63 Up to 300 301 to 1500 35 32 27 38 20 32 2 14 12 (14) 58 11 72 M10 x 1.5 depth 16 18 M18 x 1.5 69