Aluminum High Vacuum Angle Valve M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
A C width across flats D Model A B C MHZ2-10D-X46 MHZ2-16D-X46 MHZ2-20D-X46 MHZ2-25D-X46 9 11 4.5 5.2 7.5 13 7 5.8 10 15 7 6 10.7 20 7 6.2 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. Reference value to establish criteria for needle adjustment.
Refer to page 12-13-1 for further information on auto switches.
Refer to page 12-13-1 for further information on auto switches.
ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.
Use a 100 rotary actuator if you desire to adjust the angle to 90 using a double vane type. 13 14 See note below. Round head Phillips screw Stainless steel See note below. Magnet lever Note) These items (No. 11, 13, and 14) consist of auto switch unit and angle adjuster.
) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.
Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.
Proper mounting position (mm) (mm) B 8 8 7 9.5 (9) A 4 4.5 5.5 9.5 (9) A B Bore size (mm) 20 25 32 40 Bore size (mm) 50 63 80 100 7.5 (7) 11.5 (11) 10 (9.5) 14 (13.5) 13 (12.5) 18.5 (18) 17.5 (17) 23.5 (23) Note 1) Values inside ( ) are for D-P5DW, which can only be mounted on bores sizes 40 through 100.
Proper mounting position (mm) (mm) B 8 8 7 9.5 (9) A 4 4.5 5.5 9.5 (9) A B Bore size (mm) 20 25 32 40 Bore size (mm) 50 63 80 100 7.5 (7) 11.5 (11) 10 (9.5) 14 (13.5) 13 (12.5) 18.5 (18) 17.5 (17) 23.5 (23) Note 1) Values inside ( ) are for D-P5DW, which can only be mounted on bores sizes 40 through 100.
M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.
9 e r Parts list Description Material Description Material Wear ring Piston seal Deep groove ball bearing Deep groove ball bearing Size: 1 to 3 Size: 7 Round head Philips screw No.0 Hexagon socket head set bolt Parallel pin Seal washer Hexagon socket head set screw O-ring No. 14 15 16 17 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 Resin NBR Bearing steel Bearing steel Body Cover Plate Seal End cover
Kit components 11 Carbon steel R shape snap ring MIW12-12D MI-A120112 MI-A120212 MI-A120312 MIW20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 12 NBR Piston seal Standard 13 NBR Rod seal Finger Tapped on upper and lower faces Tapped on all faces 3 Nickel plated 14 NBR Gasket M-5P, For MIS only 15 Plug 12 13 14 20 Seal kit (NBR) MIW12-PS MIW20-PS MIW-A1204 MIW-A2004 Scraper assembly Grease pack
Kit components 11 R shape snap ring Carbon steel MIW12-12D MI-A120112 MI-A120212 MI-A120312 MIW20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 12 Piston seal NBR Standard 13 Rod seal NBR Finger Tapped on upper and lower faces Tapped on all faces 3 Nickel plated 14 Gasket NBR M-5P, For MIS only 15 Plug 12 13 14 20 Seal kit (NBR) MIW12-PS MIW20-PS MIW-A1204 MIW-A2004 Scraper assembly Grease pack
molybdenum steel Chrome molybdenum steel Chrome molybdenum steel Carbon tool steel Resin Bronze Steel wire NBR NBR NBR NBR NBR Note Metallic painted Chromate Hard anodized Chromate Piston rod Hard chromium electro plating 5 Bushing Guide rod Stopper screw Lever Lever holder Bumper A Bumper B 6 7 8 9 10 11 12 Hard chromium electro plating Nickel plated Nickel plated L M 20, 32 only Roller 13
(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.
17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P
Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 13 14 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by a label of "Caution", "Warning" or "Danger".
E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".