42

Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common. VFR Special Wiring Specifications 1 VQ7 14 2 15 2. Wiring specifications Double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.

MG

MGPL25-75A is selected.

Thermo-chiller

In locations where high frequency occurs 13. In locations where damage is likely to occur due to lightning 14.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-18 19 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Model/Specifications Nominal size 15 10 Action Double acting External grip 7 13 Holding force (N) (Effective value) (1) at 0.5 MPa Internal grip 12 6.5 Finger closing

Air Slide Table Series MXQ

15 14 Average speed Va mm/s Collision speed V mm/s 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

1

Calculation: Example) CJ2L10-45Z OBasic weight 22 (10) OAdditional weight 4/15 stroke OCylinder stroke 45 stroke OMounting bracket weight 8 (Axial foot) 22 + 4/15 x 45 + 8 = 42 g Single foot 8 8 25 8 25 Double foot 16 50 16 50 Rod flange 5 5 13 5 13 Head flange 5 13 5 13 Mounting bracket weight CJ2 Single knuckle joint 17 23 17 23 Double knuckle joint (including knuckle pin) 25 21 25

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Workpiece weight: 0.05 kg 25 20 0.5 Gripping force (N) 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.6 MPa).

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.6 MPa).

MXW

Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Since there are other applicable auto switches than listed, refer to page 8-7-22 for details.

CE

13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.