10

13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 178 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14 16 4 M14 x 1.5 27 1/4 84 22 55 58 4 9 186 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 18 16 5 M18 x 1.5 31.5 1/4 94 22 68 71 5 10.5 210 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25 7 18 16 5 M18 x 1.5 31.5 3/8 94 28 81 81 9 12 210 80 40 37 95 32 72 25 45 20 19 72 13

Air Slide Table

20.7 MXQ16 28 17 5 20 27.2 28.9 M10 x 1 3 MXQ16A 25.2 26.9 MXQ20 31 20 6 27 34.5 37.1 M12 x 1 4 MXQ20A 31.5 34.1 MXQ25 33 21 6 27 41.3 43.8 M14 x 1.5 5 MXQ25A 38.3 40.8 MXQ6B 25 13 3 13 13.6 15.2 M6 x 0.75 2.5 MXQ8B 27 16 4 16.2 14.9 16.7 M8 x 1 2.5 MXQ12B 28 17 5 20 20.2 21.9 M10 x 1 3 MXQ16B 31 20 6 27 25.5 28.1 M12 x 1 4 MXQ20B 33 21 6 27 32.3 34.8 M14 x 1.5 5 Model C F H K L1 L2 M N

Solid State Auto Switches

Weight (g) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 (mm) Dimensions D-M9W D-M9WV Indicator light M2.5 x 4 L Slotted set screw M2.5 x 4 L Slotted set screw 2 8 3.2 4.6 Indicator light 4 2.6 2.8 2.7 20 2.7 2.8 4 22 DD3.2 2.6 9.5 6 Most sensitive position 4 6 Most sensitive position 1591 2-Color Indication Type

01-mxs-e

MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

ISO Standard Hydraulic Cylinder

26 124 89 12 M27 x 2 80 90 161 18 36 50 13 30 39 17 44 32 1/2 136 36 65 68 80 M16 x 1.5 25 to 800 82.7 17 26 149 114.5 16 M33 x 2 93 115 186 18 45 60 41 46 20 57 3/4 159 9 41 45 68 76 100 25 to 1000 96.9 M16 x 1.5 19 32 172 128 16 M42 x 2 101 130 216 72 50 20 63 168 26 56 47 3/4 56 10 52 79 91 Bore size (mm) X2 Y Y1 Y2 ZA Z V X1 ZZ 32 5.5 73 153.5 60 20 13 10 128 26 40 6.5 98 185 22 62 20

CHKD/CHKG

D-M9/M9V D-M9W/M9WV D-M9A/M9AV Bore size (mm) D-A9/A9V D-Z7/Z80 A 12 13 15 17 18 21.5 23.5 31.5 B 19 20 21.5 23.5 27.5 31 40 49.5 B 16.5 18.5 22.5 26 35 44.5 B 15 16 17.5 19.5 27 36 45.5 B 16.5 18.5 22.5 26 35 44.5 A 10 12 13 16.5 18.5 26.5 A 8 9 11 13 17.5 19.5 27.5 A 10 12 13 16.5 18.5 26.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

Compact

20 20 65 28 27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

JIS Standard Hydraulic Cylinder

88 40 109 184 25 to 1400 40 12 15 52 52 M10 x 1.25 65 69 45 12 32 15 36 30 3/8 42 141 11 11 13 95 46 118 184 25 to 1400 1/3.5 stroke 50 15 15 52 55 M10 x 1.25 76 85 52 15 40 19 43 35 1/2 46 155 13 14 18 115 58 145 203 25 to 1400 63 15 20 55 65 M12 x 1.5 90 98 63 15 42 19 43 35 1/2 52 163 15 18 20 132 65 165 218 25 to 1500 80 17 20 80 65 M16 x 1.5 110 118 80 17 40 22 44 44 3/4 65 184 18 18

Tie-rod Type Hydraulic Cylinder

M14 x 1.5 30 22 1/4 37 50 19 50 25 9 73 53 20 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 43 63 21 55 28 8 80 60 22.4 30 11 12 102 60 122 17 17 13 M10 x 1.5 22 20 25 M18 x 1.5 30 26 3/8 47 80 26 65 M12 x 1.75 32 8 100 75 28 32 13 12 130 75 155 22 20 15 26 26 29 M22 x 1.5 35 30 1/2 57 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90 35.5 35 13 16 145 90 172 27 19 16 27 26

Compact Cylinder with Solenoid Valve/

Weight (g) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model Auto Switch Internal Circuit 8 8 7 0.5 D-M9NW(V) 14 14 13 1 Lead wire length (m) 41 41 38 3 DC (+) Brown 68 68 63 5 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black (mm) Dimensions D-M9W M2.5 x 4 l DC () Blue Slotted set screw Indicator light D-M9PW(V) 2.6 DC (+) Brown 2.7 2.8 4 22 OUT Black 3.2 DC ()

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Angle Weight (g) Load (kN) Bore size (mm) 32 40 50, 63 80, 100 125 JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 M10 x 1.25 49.5 19.5 70 2.5 24 5 8 8 17 9 0.5 M12 x 1.25 60 20 160 4.4 31 6 11 11 22 13 0.75 0.5 M16 x 1.5 71.5 22 300 11 41 7.5 14 13.5 27 15 1 M20 x 1.5 101 28 1080 31 18 59.5 11.5 24 16 32 18 2 M27 x 2 123 34 1500 38 28 66 13 27 20 41 24 2 Black color Rod

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/

Cylinder with Lock

37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5 63 20 f8 78 39 52.5 59.5 90 1/4 16 134 56.5 45 14 73 53 M8 x 1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188 89 55 20 109

Round Type Hydraulic Cylinder

Size Tolerance +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 +0.058 0 +0.058 0 +0.070 0 +0.070 0 With CDP-3 0.013 0.035 0.013 0.035 0.016 0.043 0.016 0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 Y-020B Y-032B Y-04D Y-04B 9 9 16 16 9 9 12 12 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 10 10 12 12 3.2 3.2 4 4 16 18 22 22 36 38 55 55 20 25 32 40 5 5 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25

Cylinder with Lock

37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5 63 20 f8 78 39 52.5 59.5 90 1/4 16 134 56.5 45 14 73 53 M8 x 1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188 89 55 20 109

Stopper Cylinder

QA F 13 Tubing O.D. 6 QU 8 QB Stroke Q 29 1.8 Stroke 20 QW 32 to 50 20 Tubing O.D.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility