Table of Contents Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.
D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.
F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg
) 150 (150) 130 (150) 12 53 (63) 63 (63) Note 1) ( ): Denotes the dimensions with auto switch.
150 129 15.5 173 162.5 139.5 16.5 185.5 175 150 17.5 185.5 175 160.5 12.5 198 187.5 171 13.5 210.5 200 181.5 14.5 223 212.5 192 15.5 12 11 248 237.5 213 17.5 Stations n L1 L2 L3 L4 13 14 15 16 17 18 19 20 323 312.5 297 13 310.5 300 286.5 12 310.5 300 276 17 298 287.5 265.5 16 285.5 275 255 15 260.5 250 234 13 273 262.5 244.5 14 248 237.5 223.5 12 235.5 225 202.5 16.5 129 Type45 Base Mounted
20 116 8 18 5 M20 x 1.5 62 15.5 13 26 5 8 28 M8 x 1.25 15 24 1/8 25 45 8 13 26 120 10 22 5.5 M26 x 1.5 62 19.5 17 32 6 8 33.5 M10 x 1.25 15 30 1/8 32 45 8 13 26 122 12 22 5.5 M26 x 1.5 64 19.5 17 32 6 8 37.5 M10 x 1.25 15 34.5 1/8 40 50 11 16 32 154 14 24 7 M32 x 2 88 21 22 41 8 10 46.5 M14 x 1.5 21.5 42.5 1/4 With Rod Boot l ZZ h Symbol f e B3 Stroke 1 to 50 51 to 100 101 to 150 151 to
10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (
12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21 Grommet Rail D-F59F Rail D-F7BAL/F7BAVL 12-13-22 Tie-rod D-F5BAL Grommet D-Y7BAL 12-13-24 Direct D-F9BAL 12-13-23 D-F7NTL Rail Grommet Tie-rod D-F5NTL Note) As for the applicable auto switches on Rotary Actuators, refer
Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder.
80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 20 25 32 40 109.5 134.5 Boss-cut style Built-in One-touch fitting With air cushion (mm) ZZ G 8 8 8 11 P 6 6 6 8 Q 23 26 28.5 32.5 Bore 20 25 32 40 Bore 20 25 32 40 N1 17.5 17.5 17.5 21.5 WA 13 13 13 16
119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104
129 15.5 173 162.5 139.5 16.5 185.5 175 150 17.5 185.5 175 160.5 12.5 198 187.5 171 13.5 Stations n L1 L2 L3 L4 11 stations 223 212.5 192 15.5 12 13 14 15 16 17 18 19 20 stations 310.5 300 276 17 210.5 200 181.5 14.5 235.5 225 202.5 16.5 248 237.5 213 17.5 248 237.5 223.5 12 260.5 250 234 13 273 262.5 244.5 14 285.5 275 255 15 298 287.5 265.5 16 1-6-78 79 Base Mounted Series SX3000/5000
1/4 90 (102) 13 12 (13) M14 x 1.5 150 (162) Note 1) Dimensions for each mounting bracket are the same as those for the CG1 standard or long stroke model.
58 7.5 Body mounting reference plane Note 1) 74 Lock cable (3.3) 7 6H9 ( ) depth 7 + 0.030 0 60 106 (170) L 86 A (Table traveling distance) Note 2) 86 62.4 88 [(90)] Note 4) (90) [88] Note 4) 13 Stroke 90 Origin Note 3) 2 [(4)] Note 4) (4) [2] Note 4) [Origin] Note 4) 60 61 (7.5) 60 68 31 8 8 M4 x 0.7 thread depth 8 (F.G. terminal) B D x 150 (= E) 15 60 6H9 ( ) depth 6 + 0.030 0 150 7 76
Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Torque (Nm) Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 0.09 42 2.87 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 220 13 Courtesy of Steven Engineering
VK VZ Note) For VQZ100, refer to page 4-14-13.
16 16 18.5 13.5 11.5 14 D-F9W D-F9WV D-F9BAL D-A7 D-A80 D-A9 D-A9V D-F9 D-F9V D-A79W Bore (mm) A 9.5 12.5 15.5 15.5 18 13 11 13.5 A 7 10 13 13 15.5 10.5 8.5 11 B 5.5 5 6.5 7 6 8.5 11.5 14.5 B 6 5.5 7 7.5 6.5 9 12 15 B 3 2.5 4 4.5 3.5 6 9 12 B 10 9.5 11 11.5 10.5 13 16 19 A 17 12 10 12.5 B 5 7.5 10.5 13.5 A 21 16 14 16.5 B 9 11.5 14.5 17.5 A 20 15 13 15.5 B 8 10.5 13.5 16.5 12 16 20 25 32
For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.
198 210.5 223 223 235.5 248 260.5 260.5 L4 125 137.5 150 150 162.5 175 187.5 187.5 200 212.5 212.5 225 237.5 250 250 L5 13 15 17 12 14 16 17 13 15 16 12 14 15 17 13 94 JSY1000/3000/5000 Series Type 10/Side Ported Dimensions: JSY3000 Series EX120 JJ5SY3-10S3m (D) U D B C6 C8 Stations U side D side Light/surge voltage suppressor L1 (L5) DIN rail holding screw (For DIN rail mounting) Manual
) (22.5) 150(159) l (25) (13) 170(182) (25) (13) 170(182) MB1 h + l 191(205) ZZ + l + Stroke 191(205) CA2 The minimum stroke with rod boot is 20 mm.