Aluminum High Vacuum Angle Valve

A 16 Flange size 16, 25, 40 XLG M9N A 50 1 Flange size 50, 63, 80, 100, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) C D EH EV F G H J K L M O1 R S 25 15 to 100 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 105 to 400 32 20 to 100 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 63 Up to 200 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 16 78 205 to 500 505 to 800 Size Stroke range (mm) T U B V Without lock With lock A W Z A W Z 25 15 to 100 46.5

Made to Order

CQ2W series (mm) Bore size A L 50 stroke or less 75, 100 stroke 32 40 50 63 80 100 12 64.5 54.5 (64.5) 12 74 64 (74) 13 76.5 66.5 (76.5) 13 78 68 (78) 5 L 5 L + Stroke 15 91 81 (91) 17 104.5 94.5 (104.5) A + 2 (Stroke) ( ): Denotes the dimensions with auto switch magnet.

Air Cylinder

12 (13) 162 (174) 63 23.5 12 (14) 102 (114) 12 (13) 162 (174) 80 27 16 (20) 124 (138) 198 (212) 100 30 16 (20) 124 (138) 198 (212) ZZ + Stroke S + Stroke DL1 TB ( ): Denotes the dimensions for long stroke.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63.5 63 73 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 82.2 56 43.5 30 11 18 80 Special cap bolt 95 63.5 53.5 33.5 13 20 100 108 73 53.5 39 13 22 CUJ Bore size (mm) Stroke range (mm) LT LH LY LZ LG X Y LX LS + Stroke CU A + Stroke 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 3.2 46 91.5 113 5 16.2 9 95 CQS 80 4.5 59 114 140 7 19.5 11 118 CQM 100 6 71 136 162 7 23 12.5

MHZ

100 150 Misc.

MHZ

20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHZ2-20/11-MHZ2-20 100 Overhang H (mm) 80 Pressure 0.2 MPa Pressure 0.2 MPa 60 0.3 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 40 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 12-2-13 13 Series MHZ Model Selection Confirmation of Gripping Point: Series MHZ/Internal Grip Step 2 Internal Grip Internal Grip

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Grommet D-F7NV/F7PV/F7BV 12-13-13 Rail D-J79C Connector 12-13-14 DD-F59/F5P/J51/J59 Grommet 20D-S991/S992/S99V1/S99V2 D-T991/T992/T99V1/T99V2 D-S9P1/S9P2/S9PV1/S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Grommet D-F7NV/F7PV/F7BV 12-13-13 Rail D-J79C Connector 12-13-14 DD-F59/F5P/J51/J59 Grommet 20D-S991/S992/S99V1/S99V2 D-T991/T992/T99V1/T99V2 D-S9P1/S9P2/S9PV1/S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail

15

LEC Y Motorless Motorless Dimensions [mm] LAT Size Stroke range [mm] B C D EH EV H J K L M O1 R S T U LZ 25 15 to 100 89.5 13 20 44 45.5 M8 x 1.25 24 17 12.5 34 M5 x 0.8 8 45 46.5 1.5 105 to 400 114.5 LC3F2 32 20 to 100 96 13 25 51 56.5 M8 x 1.25 31 22 16.5 40 M6 x 1.0 10 60 61 1 105 to 500 126 * The L measurement is when the unit is at the retracted stroke end position.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Rotary Actuator/Vane Type

Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 9-15-78

Integrated Controller

T1 = V/a1 = 100/5000 = 0.02 [s], T3 = V/a2 = 100/5000 = 0.02 [s] T2 = = = 1.98 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.02 + 0.02) 100 T4 = 0.15 [s] The cycle time can be found as follows.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm