S + Stroke FX FZ Relief port 20, 25 F T H ZZ + Stroke Z + Stroke Standard port 20 to 32 FY 45 4-FD Relief port (32, 40) 40 (mm) FX 66 52 40 40 34 B 10.7 7.5 7.5 7.5 DL FT 22 17 17 13 B1 FD F AL FZ G H1 H2 E C2 K I HC H FY D B2 A MM Bore size 0 41 32 32 26 20-0.033 40 32 25 20 60 60 60 4 4 4 16 13 13 13 7 7 7 5 24 46.5 37.5 33.5 28 21 19.5 19.5 15.5 24 22 22 18 14 12 10 8 47.3 37 37 30 10
12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18 22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2
Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031
ZZ + Stroke LT B C (mm) AL Bore size Stroke range Symbol B B1 C D E GA GB H H1 J K KA MM N P LD A LS LH LT LX LY S X Y ZZ 6 40 3.2 1/4 42 Up to 1000 14 27 30 27 60 70 22 44 9 16 32 27 33 15 51 8 M8 x 1.25 13 102 193 40 156 M14 x 1.5 7 45 3.2 3/8 50 Up to 1000 18 30 35 32 70 80 27 52 9 20 40 27 35 17 58 11 M8 x 1.25 13 108 206 50 162 M18 x 1.5 7 50 3.2 3/8 59 Up to 1000 18 31 35 32 85 93
Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031
Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031
Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.
MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.
MXS25 (L)MXS-AS25 (L)51653.526.532.5196M14 x 1.5M8 x 25311725.5M8 x 25
MXS25 (L)MXS-AS25 (L)51653.526.532.5196M14 x 1.5M8 x 25311725.5M8 x 25
MXS25 (L)MXS-AS25 (L)51653.526.532.5196M14 x 1.5M8 x 25311725.5M8 x 25
MXS25 (L)MXS-BS25 (L)1653.523.526.567.3121912M14 x 1.5M8 x 25331725.531M8 x 25
MXS25 (L)MXS-AS25 (L)51653.526.532.5196M14 x 1.5M8 x 25311725.5M8 x 25
MXS25 (L)MXS-BS25 (L)1653.523.526.567.3121912M14 x 1.5M8 x 25331725.531M8 x 25
MXS25 (L)MXS-AS25 (L)51653.526.532.5196M14 x 1.5M8 x 25311725.5M8 x 25
MXS25 (L)MXS-AS25 (L)51653.526.532.5196M14 x 1.5M8 x 25311725.5M8 x 25
MXS25 (L)MXS-AS25 (L)51653.526.532.5196M14 x 1.5M8 x 25311725.5M8 x 25
) 3 (R) 52 22 13 32 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 25 40 30 F.O.F.* 32 N T.T. 90 Key selector (2 position) VM220-02-36A VM230-02-36A Panel mounting hole ON T.T. 40 3 1.5 OFF 39 Max. 6 38 Symbol 2 port (A) 2 21 30.5 22.1 12 10 1 (P) 1.5 R port (3 port only) 3 port (125.6) (A) 2 (104.6) 12 10 (74.1) 1 (P) 3 (R) 52 22 13 32 16 2 x 1/4 2 x 5.5 mounting hole 25 40 30 * 0.5 MPa
60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,