Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

Air Cylinder

5.5 10 M10 x 1.25 34.5 26 0 0.033 1/8 78 109 40 1 to 300 24 21 22 14 52.4 M8 x 1.25 depth 14 36 27 11 34 8 46.5 7 12 M14 x 1.5 42.5 32 0 0.039 1/4 104 138 Female Rod End (mm) With Air Cushion (mm) Bore size A1 H KA MM ZZ 20 8 10 6 M4 x 0.7 86 25 8 10 8 M5 x 0.8 86 32 12 10 10 M6 x 1 88 40 13 10 12 M8 x 1.25 114 Bore size WA WB W 20 27 13 8.5 25 27 13 10.5 32 27 13 11.5 40 32 16 15 * When

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

5

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Air Cylinder

PD Mounting 20 12 12 13 24.2 6 25 12 10 (12) 13 26.7 6 32 12 10 (12) 13 30.2 6 40 12 10 (12) 16 34.6 8 50 13 13 20 40.6 10 63 13 13 20 47.1 10 HH Applicable Tubing O.D./I.D. Note) ( ): Long stroke Bore size (mm) 20 25 32 40 50 63 Applicable tubing O.D. (mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

to 50 75,100 10 to 50 75,100 10 to 50 75,100 10 to 50 75,100 32 13 16 45 17 M8 x 1.25 60 10.5 14 7 5.5 9 depth 7 Rc 1/8 8 55.5 30 34 40 13 16 52 17 M8 x 1.25 69 10 14 5.5 9 depth 7 Rc 1/8 8 62 7 40 30 50 15 20 64 22 M10 x 1.5 86 13 17 8 50 6.6 11 depth 8 Rc 1/4 10 77 39 63 15 20 77 22 M10 x 1.5 103 14 depth 10.5 13 17 8 60 9 Rc 1/4 10 90 39 80 21 25 98 26 M16 x 2.0 132 16 22 10 11 17.5 depth

15

Size: 25 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 12.4 NY M2.5 x 10 1.00 8 12.4 NX M2.5 x 10 1.00 8 6.9 NM1 M3 x 4 0.63 5 11.9 NM2 M2.5 x 10 1.00 6 10 Size: 32 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Pair no. of wire Insulation color Dot mark Dot color LEC Y LEC Y 1 1 Orange Red 2 Black 3 2 Light gray 11 6 Orange Red 12 Black 13 7 Light gray 21 11 Orange Red 22 Black 23 12 Light gray Motorless A side Red 4 Black 5 3 White Red 6 Black 7 4 Yellow Red 8 Black 9 5 Pink Red 10 Black Red 14 Black 15 8 White Red 16 Black 17 9 Yellow Red 18 Black 19 10 Pink Red 20 Black Red 24 Black 25 13 White

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

MSQ MHZ2 MHZJ2 MHL2 MDHR MHS 12-25 MHK MHS MHC2 MHT2 MHW2 10-25 MHY MRHQ MHL Grommet D-A72/A73/A80 12-13-7 D-A72H/A73H D-A76H/A80H 12-13-8 MHR Rail Connector D-A73C/A80C 12-13-9 D-A53/A54/A56 D-A64/A67 MHK Grommet Reed switch Solid state switch MHS D-90/97 D-A90/A93/A96 D-A90V/A93V/A96V 12-13-10 MHC Grommet D-90A/93A Direct D-R731/R732 MHT D-R801/R802 MHY D-R731C/R732C Connector D-R801C

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Grommet D-F7NV/F7PV/F7BV 12-13-13 Rail D-J79C Connector 12-13-14 DD-F59/F5P/J51/J59 Grommet 20D-S991/S992/S99V1/S99V2 D-T991/T992/T99V1/T99V2 D-S9P1/S9P2/S9PV1/S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Table of Contents

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

Integrated Controller

0 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 50 100 150 200 250 Speed: V [mm/s] 10 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) EQFS25HH/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 2.5 16 14 12 10 8 6 4 2 00 200 400 600 800

Auto Switch Guide

-10 Grommet 10-20-11 Connector 10-20-12 Band 10-20-13 Terminal conduit 10-20-14 10-20-13 DIN terminal 10-20-14 10-20-15 Grommet Rail 10-20-16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector 10-20-17 Reed Switch Solid State Switch Grommet 10-20-18 Tie-rod

Auto Switch Guide

Contact protection box CD-P11 MLGP LED Brown OUT Brown Choke coil Resistor RLQ Reed switch Zener diode Surge absorber MLU OUT Blue Blue Weight ML1C (g) D-A73 DD-A72 D-A73 D-A80 Auto switch model 10 10 10 0.5 -X Lead wire length (m) 47 47 47 3 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 77 5 Resistor 20Reed switch Zener diode Dimensions Data OUT () Blue Blue Indicator

Auto Switch Guide

D-A73H LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-A72H D-A73H D-A76H D-A80H Auto switch model D-A76H 10 10 11 10 0.5 Lead wire length (m) 47 47 52 47 3 DC (+) Brown 77 5 LED (+) Resistor Load Reed switch DC power supply OUT Black Reverse current prevention diode Dimensions () DC () Blue D-A7H, D-A80H D-A80H