Table of Contents

) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 16 (17) (16) (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29)

Table of Contents

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

A

M3x0.5 1.5 25.5 20-0.052~0 16 23.5 8 8 29 5.5 38 6 3.5 20 3.5 13 5.4 8-32 5~30 M4x0.7 1.5 27 13-0.043~0 20 27.5 7 10 36 5.5 47 8 4.5 25.5 5.5 17 7 10-32 5~30 M5x0.8 5.5 32 15-0.043~0 25 30.5 12 12 40 5.5 52 10 5 28 5.5 19 10 1/4-28UNF 5~30 M6x1 2 35.5 28-0.052~0 40 29.5 13 16 52 8 69 14 7 40 5.5 9 Depth7 1/8 2 11 57 18 18.3 3/85~50 5 M8x 2 36.5 39.5 24UNF 75, 100 1.25 46.5 35-0.062~0 50

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Air Cylinder Series CM2

8 41 28 5 6 30 15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177 188 13.5

Compact Cylinder

Foot or Flange: Body mounting bolts Double clevis: Clevis pin, Type C retaining rings for axis, Body mounting bolts Spring Force 20 44 91 138 25 (N) Single Acting, Spring Return 84 160 235 32 152 273 393 Bore size (mm) Stroke (mm) Spring reaction force (N) Second First 40 288 499 710 8.6 3.9 10.3 5.9 10 5.9 16 11 23 16 13 21 30 24 13 13 15 15 15 15 20 20 30 30 30 39 50 54 5 10 5 10 5 10 5

Hydraulic

22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19 16 M12 x 1.75 27 13 80 231 14 90 139 14 34 M27 x 2 35 32 125

NCQ2/CQ2

47.5 40.5 3.5 44 53 42 3.5 49.5 60.5 51 3.5 57 M16 x 2 21 70 60.5 3.5 66.5 M3 x 0.5 6 M5 x 0.8 7 M5 x 0.8 7 M8 x 1.25 13 M8 x 1.25 13 M10 x 1.5 15 M10 x 1.5 15 M20 x 2.5 27 M20 x 2.5 27 With Auto Switch 12 20 32 40 50 63 80 100 Bore size Stroke (mm) 10 20 30 48 40.5 3.5 44.5 M6 x 1 9 10 20 30 56.5 50 3.5 53 M6 x 1 9 10 20 30 57.5 50.5 3.5 54 10 20 30 63 52 3.5 59.5 10 20 30 70.5 61 3.5 67

Table of Contents

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

ZP

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Smooth Cylinder/Low Speed Cylinder

flats KA NA L S + Stroke RR ZZ + Stroke Z + Stroke (mm) B1 P RR E H KA L N NA NN U A CI I Z H1 K MM S AL CD ZZ CX D F G FL Bore size (mm) 0 0.033 20 15.5 13 10.5 5 M8 x 1.25 M20 x 1.5 133 142 9 41 6 30 15 24 14 18 24 28 5 62 9 10 8 13 8 20 0 0.033 25 33.5 5.5 M10 x 1.25 19.5 17 10.5 6 M26 x 1.5 137 146 9 45 8 30 15 30 14 22 30 62 9 10 10 13 8 26 0 0.033 32 34.5 37.5 5.5 M10 x 1.25 19.5 17

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

10 12 40 46.5 48.5 54 63.5 75 33 39.5 40.5 46 53.5 63 13 13 15 15 21 27 17 17 22 22 26 26 8 8 10 10 12.5 12.5 64.5 71 86 99 122.5 143.5 30 30 39 39 48 48 Note) External dimensions with rubber bumper are the same as standard type, as shown above.

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread 10 13 16 20 25 32 10 20 30 40 50 B5 A10 M5 x 0.8 5 13 8 N S U F GN GS 10 4.5 15 J K ZP T U 10 20 30 50 5 9 B5 M5 x 0.8 40 50 A14 10 B01 N01 T01 16.5 Rc1/8 NPT1/8 NPTF1/8 13 20 30 50 12 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates

Table of Contents

41.5 30 T 1 2 3 8 KQ2L11-13 43 17.9 30 17 25.5 7 21 25 Note) D1: Max. diameter VMG Applicable fitting Extended Male Elbow: KQ2W Applicable tubing O.D.

AC Servo Motor Driver (Network card type ）

13 1 13.

5

19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 D32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39

CQ2

41 55.5 62 77 30 30 39 16 16 20 7 7 8 13 13 15 45 8.5 8.5 11 M8 X 1.25 51.5 56.5 44.5 49.5 11 Depth 8 M10 X 1.5 58.5 50.5 68.5 60.5 Refer to p.2.3-18 for rod end nut and optional bracket.

Air Cylinder Series MB

35 35 40 40 6 8 11 11 13 16 47 51 58 58 72 72 46 52 65 75 95 114 33.5 38.5 45 50 62 71.5 32.5 38 46.5 56.5 72 89 45 52.5 59 64 76.5 86 12 16 20 20 25 30 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 12 13 13 16 16 6 6 7 7 10 10 30 35 40 45 45 55 15 21 21 21 30 30 13 13 14 14 20 20 16 16 16 16 16 16 13 14 15.5 16.5 19 19 4 4 5 5 5 5 21 27 27.5 28.5 37 37 -W Stroke range (mm) Bore