Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: 1 (0.005 to 0.2 MPa Setting)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

Modular F.R.L. Units

Clean series y Copper, Fluorine and Silicone-free + Low Particle Generation For details, refer to the Clean Series/Low Particle Generation section of the Web Catalog. 21 Standard model no.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

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And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Air Pilot Operated Series NVSA

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

Mechanical Valves Series NVM, NVFM, NVZNI

Millimeters in Parentheses NVFU250-N02-01 v t 4 m m 'Actuators may be rotated to operate without changing port location: Remove screws and reverse actualor NVFM250-N02-02 B A ^^l\-Tli-7L. s--1r\lll /rH E8 PEA 'Actuators may be rotatad to oprate without changing porl location: Remove screws and roverse actuator. 0 1 8 i n ( 4 6 Series NVM MECHANICALLY ACTUATED/PI LOT OPERATED DIMENSIONS

IIIIIII

r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54 0 6 7 (17\ 0 9 2 23 a' 0 5 1 (13) 0 1 2 (3) 0 7 9 (20) 0 1 9 (4 8) 2 9 5 (75) 0 5 5 (14) o70 't7 8) 008 (21

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s1 be a 3 pos lon vave assembly Individual SUP/EXH spacer Series SVl000 sv1000 Spacer type Port s ze for Ser es SV2000/3000/4000 sx3000-22 I (M2 x 39 5) sv2000-21-6 ([I3 x 46) sv3000 21-3 (N44 x 5s) sY7000-r 1-r 1 sv2000 sv3000 sY5000 1r 15 sY9000-11-2 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported flow Cv p c h (mm) I\Ietal seal vQz10m Up to o5L) voz2m0 Up to o80 Up 10 ol00 voz300o

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

For how to order the digital pressure switch, refer to page 709. 704 Direct Operated Precision Regulator/Modular Type Series ARP20/30/40 Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Flow Characteristics (Representative values) Pressure Characteristics (Representative values) ARP20(K) ARP20(K) Rc 1/4 0.50 0.25 0.45 ARJ

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

For how to order the digital pressure switch, refer to page 767. 762 Direct Operated Precision Regulator/Modular Type ARP20/30/40 Series Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Flow Rate Characteristics (Representative values) Pressure Characteristics (Representative values) ARP20(K) ARP20(K) Rc 1/4 0.50 0.25 0.45

3

b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21

Series 12-REA Sine rodless cylinder

C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x 11.5 M12 x 1.25 x 7.5 192 180 0 26 25 0 32-0.039 167 Specific Product Precautions Be sure to read before handling. 12-CY1B/3B/1R

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1R (1+R)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: GH (G+H), Specifications: 1R (1+R)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: None, Thread: N (NPT), Port Size: 04 (1/2), Accessory: H (Set Nut for Panel Mount), Specifications: 1R (1+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 1R (1+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 1R (1+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)