Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

15

3 14 17.7 NY M4 x 0.7 8 70 50 3.5 22.5 78 M3 x 12 3.6 M5 x 22 3 14 17.7 NX M5 x 0.8 10 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NW M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 9 11.7 NV M4 x 0.7 8 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NU M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 11 11.7 NT M5 x 0.8 10 70 50 3.5 22.5 78 M3 x 12 1.5 M5 x 22 3 12 17.7 LEC Y 63

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

CQS

39.5 40.5 52 57.5 CL 3.5 3.5 4.5 5 L 14 15.5 18.5 22.5 L1 65.5 66.5 82.5 89 B 59.5 60.5 73.5 79 CL 13.5 13.5 14.5 15 L 24 25.5 28.5 32.5 L1 A 22 22 29.5 32.5 A 32 32 41 44 L 14 15.5 18.5 22.5 L1 45.5 46.5 61 67.5 B 34.5 35.5 42 47.5 CL 3.5 3.5 4.5 5 12 16 20 25 40.5 41.5 51 57.5 17 17 19.5 22.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 B + Stroke CL+Stroke A

Auto Switch Guide

RS H A Auto Switch Internal Circuit D-B53 RZQ MI W S CEP1 Weight Reed switch LED OUT () Blue OUT (+) Brown Resistor (g) CE1 D-B53 D-B54 D-B64 Auto switch model Zener diode CE2 22 22 22 0.5 Lead wire length (m) 78 78 78 3 ML2B 126 126 5 D-B54 C J G5-S Dimensions Zener diode CV Choke coil Resistor OUT () Blue OUT (+) Reed switch LED MVGQ Surge absorber CC Indicator light DB64 without indicator

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

3H9 ( ) depth 2.5 +0.025 0 1 12 7 7 3.2 3.2 6.3 A B H G (NN 1) x H 10.5 5.5 10.5 5.5 A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Auto Switch Guide

light 8 3.2 DC (+) Brown 2.6 2 4.6 4 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

Auto Switch Guide

light 8 3.2 DC (+) Brown 2.6 2 4.6 4 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

Auto Switch Guide

light 8 3.2 DC (+) Brown 2.6 2 4.6 4 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

Compact Cylinder

+ Stroke M A + Stroke E 25 Width across flats K M: Rod end male thread H D Hexagon width across flats B1 Rod end nut H1 C X L Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L X 20 25 13 14 10 M8 x 1.25 5 8 22 16 13 14 12 M8 x 1.25 5 10 22 16 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10 5

Table of Contents

(Example) CUJ-M3 x 27l A A C B B D Axial mounting style Lateral mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting

Auto Switch Guide

Be careful not to exchange the power cable (brown) with the output cable (black). 9-15-37 38 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

MY1

22 3.5 4.5 5.5 5.5 46.7 67.3 73.2 73.2 7 12 15 15 MY1C25 MY1C32 MY1C40 16 22 22 66 82 95 6 8 8 52 67 78 MY1C50 MY1C63 40 52 20 26 66 77 18.5 19 8 8 8-11-64 62 Series MY1C Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Side Support Side support A MY-SA 2-G MX 2-H F E C D A B MTS MY Side support B MY-SB CY MG 2-J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5 depth 3 10.05 +0.030 0 D B 16.5 3.5 18

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3