CV/MVGQ 25 32 40 Stroke range NA N 41 M8 x 1.25 M20 x 1.5 18 15.5 8 13 65.3 28 5 19.8 Up to 300 13 26 5 20 0 0.033 15 24 13 45 5.5 M10 x 1.25 M26 x 1.5 Up to 300 22 19.5 17 32 10 6 70.5 33.5 22 26 0 0.033 15 30 M26 x 1.5 Up to 300 22 19.5 17 32 12 13 45 6 76.5 37.5 5.5 M10 x 1.25 25.8 26 0 0.033 15 34.5 21 16 50 46.5 7 M14 x 1.5 M32 x 2 29.8 Up to 300 24 22 41 14 8 84.5 32 0 0.039 42.5 21.5 Z ZZ
25 32 40 Stroke range NA N M20 x 1.5 41 M8 x 1.25 13 5 15.5 28 19.8 18 8 65.3 Up to 300 13 26 5 20 0 0.033 24 15 M26 x 1.5 45 M10 x 1.25 13 5.5 19.5 33.5 22 22 10 70.5 Up to 300 17 32 6 26 0 0.033 30 15 M26 x 1.5 45 M10 x 1.25 13 5.5 19.5 37.5 25.8 22 12 76.5 Up to 300 17 32 6 26 0 0.033 34.5 15 M32 x 2 50 M14 x 1.5 16 7 21 46.5 29.8 24 14 84.5 Up to 300 22 41 8 32 0 0.039 42.5 21.5 ZZ Z
Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.
448 34 485.5 37 473 36 39 498 38 40 L dimension 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions
5 to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric power 180VA 300VA 300VA 300VA 640VA 180VA 300VA 640VA 180VA 300VA 640VA 640VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008
113 3.2 AR60K-D m28 51 m27.8 61.5 70 75 66 11 22 113 3.2 *1 The dimension of B is the length when the regulator knob is unlocked. 84 A Regulator/AR20-D to AR60-D Regulator with Backflow Function/AR20K-D to AR60K-D Made to Order Please contact SMC for detailed dimensions, specifications, and lead times. q0.4 MPa Setting The setting specification is 0.4 MPa.
Note 2) 5 to 50C when the digital pressure switch will be used.
B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.
C.O. 4 220V AC 50/60Hz Valve size 1 to 4 1 6A 8A 10A 5 1 8 1 4 3 8 24V DC 12V DC 240V AC 50/60Hz 7 6 7 8 11 15 11 Other 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 25 4 20A 3 4 Valve size 5 to 7 25A 1 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange Electrical entry/Indicator light and surge voltage suppressor Grommet Grommet with surge voltage suppressor Grommet terminal Grommet terminal
EXH Flow Rate Characteristics Model Port size Flow rate characteristics Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH
G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8
B 22 46 Code q Code w Ejector exhaust type Weight Standard accessory Codes q and w are corresponding to the suffixes in How to Order to indicate the exhaust method.
L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction None Nil NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output
Purchasing order is available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.
2) 1% F.S. or less range 3% F.S. or less (15 to 35C [59 to 95F]) 5% F.S. or less (0 to 50C [32 to 122]) 1.0MPa (145psi) Withstanding pressure Temperature characteristics Note 2) 3kPa (50l/min) [0.4psi (1.77SCFM)] Pressure loss PNP open collector 80mA, 2 outputs Operating temperature NPN open collector, 30V 80mA, 2 outputs 0 to 50C (32 to 122F) with no condensation Output specifications
0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.
G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8
Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.
Refer to page 13-3-22. Refer to (4) below. ZR1-FZ (30 m) t Note) ZSE2-OR-15Note) Precautions on handling the filter case 1. The case is made of polycarbonate.
L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output