Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

Title not found

Y . u , E 37 | 1/2" NPT M6 0 t 02 03 04 M 6 x 1 . 0 PT1/8 Pr1/4 PT3V8 PT1/2 a a a a a o a a a a a a a a a a a o a a a a a a a a a a a o a a a a a a a a a a a r a a a a a a a r a a a a a a a a o a r a o a a a The use of compact spacer with bracket reduces the total assembled space.

90

Modular Products and Accessories Description IR10l0-A IR20l0-A IR30l0-A Applicable products and accessories Applicable size IR1000-A series IR2000-A series IR3000-A series Bracket assembly Note 1) IR10P-501AS IR20P-501AS IR30P-501AS Filter AF20-A AF30-A AF40-A Hexagon panel nut IR10P-600S IR20P-600S IR20P-600S 0.2 MPa setting G33-2-l01 G43-2-l01 G43-2-l01 Spacer Y200-A Y300-A Y400-A Round

ITV

Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Note) Refer to the table below for possible mixed combination.

Table of Contents

B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid pressure Fluid Operation Operating fluid temperature 0 to 3.5 MPa Coolant External pilot solenoid/Air operated 5 to 60C /5 to 60C (NBR seal) 5 to 60C /5 to 99C (FKM seal) 0 to 7.0

2/3 Port Valve

(Up to 60C) Fuel oil (Up to100C) (3) X F, B L, J B J J T A H Brass, Copper or BC6 H EPR FPM NBR FPM EPR FPM FPM EPR NBR FPM G H J L B Stainless steel Silver(10 to 25A) Not available for 32A to 50A A H D N G, J E P A H A H A H B D, E J N, P N P T H Steam system (Water for boiler) Insulating oil Steam system (Condensate) Brass, Copper or BC6 B X VX Naphtha Note ) The mark in the option

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Proposals for Energy Saving

Note 2) Changing from an internal pilot to an external pilot or vice versa is not possible. 04 4 5 1 VP3 A G 1 04 4 5 1 VP3 A G 1 Pilot option VP 3 port solenoid valve Standard (Internal pilot) External pilot 1 Nil 1 Type of actuation 1 No. of solenoids Single A B N.C. (Normally closed) N.O.

VQ5000

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

VXD21/22/23

Able to control a wide variety of fluids. VC VDW Valve can be matched to a particular application through selection of body material (Brass/BC6 or Stainless steel), seal material (NBR, EPDM or FKM) and solenoid coil (Class B or H) Easy to disassemble and reassemble in a short time. VQ VX2 N.C.

VXP21/22/23

Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

7

Steel (1/4, 3/8, 1/2) Grommet U E 300 C (42) 40 2 For Heated water/ High temperature oil Full-wave rectifier T A b a IN OUT 3 A VXD2 Port size 04 (1/2) (With bracket) M B 2 x P Port size I F L K J (D) e d 1.6 f IN OUT a b 18 f Conduit terminal e d 2 x P Port size E (U2) (V2) 34 32 T 3 A VXD2 C F 25 3 A Note) Only the VXD2 with port size of 04 (1/2) has threads on the bottom of the body

HRX-OM-W032

For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.

Fluoropolymer Piping Equipment

A A A A A Note) For details of the applicable tubing sizes, refer to page 945.

Table of Contents

P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 33 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

3 Port Solenoid Valve/

254.2 AW30-03G-A Y300T-A E300-03-A VP744-5DZ1-04-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5