Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

Table of Contents

240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D sealing, with thread): DXT060-32-4A 17-4-32 3 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111

2/3 Port Valve

VX3324-03 VX3234-03 VX3334-03 VX3244-03 VX3344-03 6 0.33 0.5 4 9 0.19 2.2 3.4 3 8 0.33 3 6 (10A) Option Material 0.5 4 9 No.

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

VQ5000

B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

VXD21/22/23

How to Order (Normally Open) VXD21 2 VXD22 VXD23 Bracket Nil B None With bracket VC Model Thread connection sizes are available from 03 to 10. Electrical option VDW Nil S L Z None With surge voltage suppressor With indicator light With light/surge voltage suppressor Body size 4 5 6 7 8 9 VQ 15A 20A 25A 32A 40A 50A VX2 Refer to the table (2) given below for availability.

VXP21/22/23

How to Order (Normally open) VXP21 2 VXP22 VXP23 Bracket Nil B None With bracket Thread connection sizes are available from 03 to 10. VC Model Electrical option Nil S L Z VDW None With surge voltage suppressor With indicator light With light/surge voltage suppressor VQ Body size 4 5 6 7 8 9 15A 20A 25A 32A 40A 50A VX2 Refer to the table (2) given below for availability.

Table of Contents

P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 33 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

2/3 Port Valve

Description B VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Bracket (with bolt and washer) 4.2-30 VNH Specifications 3 port valve 2 port valve A B A B VNH311 20A A B VNH411 25A A B VNH113 10A A B VNH213 15A A B VNH313 20A A B VNH413 25A A B VNH133 10A A B VNH233 15A A B VNH333 20A A B VNH433 25A A B VNH111 10A VNH211 15A Model Operating fluid pressure Fluid Operation 0 to 7.0MPa 0 to

VQ7-6/7-8

P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 33 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC

Battery-less

3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

Pulse Valve

JSXF-06B-KT 55-JSXFA(E, F)-06m-B-mA JSXF-06B-A-KT 55-JSXFA(E, F)-10m-B-m JSXF-10B-KT 55-JSXFA(E, F)-10m-B-mA JSXF-10B-A-KT 55-JSXFA(E, F)-14m-B-m JSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) 13 Dedicated Controller for Operation VXFC Series [Excludes the VXFCmA] Dedicated Controller for Operation / VXFC Series How to Order Controller [Application example] D VXFC 06

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect