3

Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to

Process Valve Series VNA

2 x 2 x A B A B A B A B 60 80 100 115 235 (221) 264.5 (250.5) 300 (286) 319 (305) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 8 VNC 1 4 1 4 VNH Note) ( ): CE compliant product (-Q) VND Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

HRX-OM-R026

/Japanese 1pc.) 3 Y strainer (40meshes) 25A 1pc. 4 Barrel nipple 25A 1pc. 5 Anchor brackets The anchor bolts are not attached 2pc.

5-Port Solenoid Valve

2 Thread type Non-polar U V S Positive common Z V NS Negative common NZ V r Pilot type Nil Rc F G N NPT T NPTF Terminal Block Nil Internal pilot R External pilot V Lead Wire * Only Nil is available for M5. Circular Connector * Select R, U, S, or Z for the valve when the SI unit output polarity is positive common.

240

2 2 Lead 5 (LEPS10(L)K) LEH 1.5 Lead 10 (LEPS10(L)J) 1 1 LEY -X5 Lead 10 (LEPS10(L)J) 0.5 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 11LEFS 200 200 11LEJS Set Value of Pushing ForceForce Graph (Guide) 25ALEPS6 (Basic) LEC 25 LEC S Lead 4 (LEPS6K) 20 LEC SS-T Force [N] 15 Lead 8 (LEPS6J) 10 LEC Y 5 Motorless 0 70 80 90 100 Set value of pushing force [%] LAT Set value of pushing

SFOD-OMT0010

[mm] 30 20 10 Stroke [mm] 1200 1000 1100 1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] 30 20 10 (Independent and interpolation) Min. speed [mm/s] 49 33 17 (Speed tuning control) Supplement 1.3 Initial setting of LES(H) series Model LES(H)8 LES(H)16 LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16 8 Max. speed [mm/s] 400 200 400 200 400 200 Min.

JXCx-OMU0026

48 Min. speed [mm/s] (Speed tuning control) 78 Supplement 1.6 Initial setting of LER series Model LER10 LER30 LER50 Lead symbol J K J K J K Lead [mm] 12 8 12 8 12 7.5 Max. speed [mm/s] 420 280 420 280 420 280 Min. speed [mm/s] (Independent and interpolation) 30 20 30 20 30 20 Min. speed [mm/s] (Speed tuning control) 38 25 38 25 38 25 -113No.

JXCx-OMT0002

280 420 280 Min. speed [mm/s] (Independent and interpolation) 30 20 30 20 30 20 Min. speed [mm/s] (Speed tuning control) 38 25 38 25 38 25 Supplement 1.7 Initial setting of LEH series Model LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 Lead symbol K Lead [mm] 251/73 249/77 246/53 243/48 242/39 (6.205) 254/43 (5.907) (3.438) (3.234) (4.642) (5.063) Max. speed [mm/s] 80 80 100 100

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

SFOD-OMT0009CN

150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14 () 109 No.SFOD-OMT0009CN-B 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 [mm/s] 1100 1400 1500 [mm/s] 48 () [mm/s] 78 () 1.6 LER LER10 LER30 LER50 J K J K J K [mm] 12 8 12 8 12 7.5 [mm/s] 420 280 420 280 420 280 [mm/s] 30 20 30 20 30 20 () [mm/s] 38 25 38 25 38 25 () 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40

JXCx-OMT0001CN

1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 mm/s 1100 1400 1500 [mm/s] () 48 [mm/s] () 78 1.6 LER LER10 LER30 LER50 J K J K J K [mm] 12 8 12 8 12 7.5 mm/s 420 280 420 280 420 280 [mm/s] () 30 20 30 20 30 20 [mm/s] () 38 25 38 25 38 25 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 K [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234) (4.642) (5.063) (6.205

53

20 s Max.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

VQ5000

J. S. T. Manufacturing Co., Ltd.

1

or more, X: 20 mm or less H: M5 or less For 12 For 12 J: 3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less XA2 XA17 H: M8 or more, X: 26.5 mm or less H: M8 or less 20 20 J: 5 mm or more, I :11 mm or less J: 5 mm or more, I: 11 mm or less H : M10 or more, X:

smcmaintenancepartslist

6 Single acting, spring return Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Gasket Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8