The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

Air Slide Table

75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20

MXQ

-10 MXQ12L-20 MXQ12L-30 MXQ12L-40 MXQ12L-50 MXQ12L-75 MXQ12L-100 Note) Note) Note) Refer to the bottom view of MXQ12L-40. 8-5-26 27 Air Slide Table Series MXQ With shock absorber (12): MXQ12L-BS/BT/B MX Stroke Adjustable Range (mm) 10 Maximum 30 10 29.5 MTS 29.5 Max. 18 Extension end 18 Retraction end 18 Shock absorber at extension end Shock absorber at retraction end MY Other dimensions

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

2

Size 3 5 10 20 60 75 100 Semi-standard Symbol Specifications Note Size 3 5 10 20 60 75 100 Nil Standard Combination with drain discharge method symbol: Nil is not available.

Table of Contents

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

1

, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 * Manufacture of intermediate strokes at 1 mm intervals is possible.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Battery-less

Check the SpeedWork Load Graph on page 75.

Proposals for Energy Saving

Cylinder bore size/Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches /Refer to page 5.3-2 of "Best Pneumatics No. 2" for auto switch related information.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25lV6B/Ball Screw Drive LEFS25lV6B/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

Table of Contents

P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 33 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC

2/3 Port Valve

Refer to p.4.1-74, 4.1-75 for specifications and models.

42

Silencer box assembly: VVQ4000-33A (With gasket, screw) Type SU Double check spacer with residual pressure exhaust VVQ4000-25A-1 (Plug-in type) VVQ4000-25A-5 (Plug lead type) Caution Specifications Double check spacer part no.

3 Port Solenoid Valve/

Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-. X536 X538 X555 How to Order 25AVP 4 5DZ1 Fill in according to How to Order above. Note) Electrical entry can be selected only for D type. Check valve type is available only when the thread type is Rc.

Table of Contents

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

VQ5000

Operate in a range such that the cylinder pressure is less than two times the supply pressure. 00 51 Applicable solenoid valve 1 2 VQ54 VQ5 VVQ5000-25A-1 (plug-in type) VVQ5000-25A-5 (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves