VQ5000

Operate in a range such that the cylinder pressure is less than two times the supply pressure. 00 51 Applicable solenoid valve 1 2 VQ54 VQ5 VVQ5000-25A-1 (plug-in type) VVQ5000-25A-5 (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves

2/3 Port Valve

Note 4) 32A to 50A are 80oC. q 32A to 50A 15A to 25A Stainless steel FPM/EPR Bonnet w 32A to 50A O ring e Stainless steel, FPM, 15A to 25A Stainless steel, Brass, NBR Stainless steel, EPR Diaphragm assembly r Stainess steel, Brass FPM/EPR 32A to 50A Valve spring Stainless steel t Stainless steel Copper NBR Polyacetal PTFE Class B molded Stainless steel, Silver FPM/EPR, PTFE 15A to 25A

Steam Valve

, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Operate in a range such that the cylinder pressure is less than two times the supply pressure. 00 51 Applicable solenoid valve 1 2 VQ54 VQ5 VVQ5000-25A-1 (plug-in type) VVQ5000-25A-5 (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves

VND

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D

VXD21/22/23

Electrical option VDW Nil S L Z None With surge voltage suppressor With indicator light With light/surge voltage suppressor Body size 4 5 6 7 8 9 VQ 15A 20A 25A 32A 40A 50A VX2 Refer to the table (2) given below for availability.

VXP21/22/23

Electrical option Nil S L Z VDW None With surge voltage suppressor With indicator light With light/surge voltage suppressor VQ Body size 3 4 5 6 7 8 9 10A 15A 20A 25A 32A 40A 50A VX2 Refer to the table (2) given below for availability.

VQ4000

(Common EXH type) 26.4 1(P) 4(A) Rc 3/8 2(B) 3(R') 3(R2) 5(R1) Circuit diagram Plug-in type Plug lead type 2-5-34 35 Base Mounted Series VQ4000 Plug Lead Unit Throttle valve spacer VVQ4000-20A-1 (Plug-in type) VVQ4000-20A-5 (Plug-lead type) 165 (Plug-in type) 117.5 (Plug lead type) 25 A throttle valve spacer is mounted on a manifold block to control cylinder speed by throttling exhaust air

3

F C37 1/2 15 G Stainless steel B 100 VAC Grommet With surge voltage suppressor C 110 VAC 5 20A N.C. H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Table of Contents

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

Air Slide Table Series MXQ

-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-50 MXQ20-50 MXQ20-30 MXQ20-100 MXQ20-150 0.08 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-100 MXQ20-20 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 400 500 600 100 200 300

MX-OMP0051

A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 11 (MPa) (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2 MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 MXQ8(A,C) MXQA-A887 MXQ8B MXQB-A887 MXQ12(A,C) MXQA-A1287 MXQ12B MXQB-A1287 MXQ16(A) MXQA-A1687 MXQ16B MXQB-A1687 MXQ20(A) MXQA-A2087 MXQ20B MXQB-A2087 MXQ25(A) MXQA-A2587

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model D7 L26 L28 AS-10A AS1002FS 9.2 4 18.7 AS-20A AS2002FS 9.4 8.8 20.4 AS-25A AS2052FS 11.4 6.3 27 AS-30A AS3002FS 11.8 5.9 32.1 Part no. Applicable model D7 L27 L28 AS-10A1 AS1002FS 9.2 4.5 18.7 AS-20A1 AS2002FS 9.4 9.3 20.4 AS-25A1 AS2052FS 11.4 7.1 27 AS-30A1 AS3002FS 11.8 6.4 32.1 2 x D7 2 x D7 L26 L27 L28 L28 The AS4002FS can be mounted without the adapter.

Electromagnetic Digital Flow Switch

(with no condensation) Standards and regulations CE marking, RoHS Fluid contact materials PPS, FKM, Brass Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) 1 (25A) Weight (Body)*4 Approx. 335 g Approx. 395 g Approx. 515 g Approx. 675 g *1 Refer to the Applicable Fluids List on p. 20. *2 When fluids with high temperature are used, the available pressure range will be reduced.

03-ckqg_ckqp-e

CKQG-25A CKQG-R200S CKQG-30A 183

Note 2) The standard flow rates are as follows: 22.5 L/min for port size 15A, 40 L/min for port size 20A, and 65 L/min for port size 25A.

VXR21/22/23

VQ Electrical entry G C D T Body size 5 6 7 8 9 Grommet Conduit DIN terminal Conduit terminal 20A 25A 32A 40A 50A VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to the table (2) given below for availability.

VQC

-1 Note 1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 Throttle valve spacer VVQ4000-20A-1 A B P PUSH LOCK Note1) Perfect spacers with residual pressure release valve cannot be combined with external pilot specifications. 4 Series VQC Base-Mounted Type Plug-in Unit Models Model Response time ms Note 2) Flow characteristics Series No. of solenoids Weight 4, 25, 3

Bore Size: 20mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -