MXQ

-10 MXQ20L-20 MXQ20L-30 MXQ20L-40 MXQ20L-50 MXQ20L-75 MXQ20L-100 MXQ20L-125 MXQ20L-150 Note) Note) Note) Refer to the bottom view of MXQ20L-50. 8-5-34 35 Air Slide Table Series MXQ With shock absorber (20): MXQ20L-BS/BT/B Stroke Adjustable Range (mm) MX 16 Maximum 54 13 0.5 Max. 35 Extension end 35 Retraction end 35 0.5 MTS 46.5 46.5 Shock absorber at retraction end Shock absorber at extension

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ20L-125 13-/22-MXQ20L-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20L-50. 819 MXQ 1322Air Slide Table Dimensions: MXQ20L / Symmetric Type 1322Axial piping (20): MXQ20L-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

Table of Contents

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

PVC Quick Drain Valve

LVW Series O-ring material Symbol Material Symbol Orifice size Body class 60 80 Nil N FKM 25 6 EPDM 40 8 65 90 9 80 Pilot port thread type Symbol Thread type Port size Nil N Rc1/8 Symbol Body class Applicable PVC piping external diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model LVW60 LVW80 LVW90 Nominal diameter 80A 40A 65A 32A

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism With surge absorbing mechanism (surge absorbing diode) mechanism Note) A-side energized: Light (orange) ON B-side

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

V100

(The standard valve has an individual exhaust for the pilot valve.) 4-14-18 19 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Model M5 (VQZ100 only) VQZ100/200 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ300 VVQ1000-51A-C8 VVQ1000-51A-C10 VVQ1000-51A-C6 Note) Purchasing order is available in units

VXR21/22/23

VQ Electrical entry G C D T Body size 5 6 7 8 9 Grommet Conduit DIN terminal Conduit terminal 20A 25A 32A 40A 50A VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to the table (2) given below for availability.

smcmaintenancepartslist

Port plug K PBT/HNBR Refer to page 239. 238 Series ARM11A/B Compact Manifold Regulator Options Replacement Procedure is P.453 One-touch Fittings for Regulator Block Straight type Elbow type VVQ1000 50A C4 Actuators Modular F.R.L.

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ Conduit terminal

1

MGPM20-35A-XC19 15 mm width collar is installed in MGPM20-50A. C dimension is 112 mm. Example Note) Intermediate strokes (by the 1 mm interval) with a special body are available by made-to-order. 6-17-80 63 Made to Order Common Specifications: -XC20: Head Cover Axial Port Symbol -XC20 25 Head Cover Axial Port Head side port position is changed to the axial direction.

VN-OMP0002

411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.

3 Port Air Operated Valve Series SYJA300 1

5 Body type V For vacuum and low pressure (50A) 2 Specifications Fluid Air N.C. only (N.O. only for vacuum) Type of actuation For general purpose Operating pressure range 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Refer to the graph of pilot pressure.

PA3145/3165/3185

5 Body type V For vacuum and low pressure (50A) 2 Specifications Fluid Air N.C. only (N.O. only for vacuum) Type of actuation For general purpose Operating pressure range 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Refer to the graph of pilot pressure.

VP3145/3165/3185

) 1 VQZ 04 06 10 12 14 20 VZ Option (32A) 1 4 1 (40A) 1 2 1 Coil rated voltage VS 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100 VAC, 50/60 Hz 200

Fluid temperature from 1 to 60°C; Port size: 1/4 to 1 inch, Flange: 32A to 50A; Other options: applicable to deionized water, oil-free, port threads, bracket; Series 25A-VXD is compatible with secondary battery applications

Fluid temperature from 1 to 60°C; Port size: 1/4 to 1 inch, Flange: 32A to 50A; Other options: applicable to deionized water, oil-free, port threads, bracket; Series 25A-VXD is compatible with secondary battery applications