Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

MX-OMP0051

(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A

V100

(The standard valve has an individual exhaust for the pilot valve.) 4-14-18 19 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Model M5 (VQZ100 only) VQZ100/200 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ300 VVQ1000-51A-C8 VVQ1000-51A-C10 VVQ1000-51A-C6 Note) Purchasing order is available in units

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-10 13-/22-MXQ6-20 13-/22-MXQ6-30 13-/22-MXQ6-40 13-/22-MXQ6-50 Note) Note) 1322Note) Refer to the bottom view of MXQ6-30. 801 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Axial piping (6): MXQ6-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

VXR21/22/23

VQ Electrical entry G C D T Body size 5 6 7 8 9 Grommet Conduit DIN terminal Conduit terminal 20A 25A 32A 40A 50A VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to the table (2) given below for availability.

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

A

F U N C T I O N A L O P T I O N S ACCESSORIES SHOCK ABSORBER SERIES MXQ -l Standard F With Buffer R* With End Lock P Axial Piping FR* With Buffer and End Lock FP With Buffer and Axial Piping T Y P E O F A U T O S W I T C H E S Without *With Auto Switch, see Accessories Section Type Model RB0805 MXQ8 RB0806 MXQ12 * Not Available for MXQ6 RB1007 MXQ16 RB1411 MXQ20 RB1412 MXQ25 ACCESSORIES

CATALOG

F U N C T I O N A L O P T I O N S ACCESSORIES SHOCK ABSORBER SERIES MXQ -l Standard F With Buffer R* With End Lock P Axial Piping FR* With Buffer and End Lock FP With Buffer and Axial Piping T Y P E O F A U T O S W I T C H E S Without *With Auto Switch, see Accessories Section Type Model RB0805 MXQ8 RB0806 MXQ12 * Not Available for MXQ6 RB1007 MXQ16 RB1411 MXQ20 RB1412 FOR MORE TECHNICAL

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ Conduit terminal

1

MGPM20-35A-XC19 15 mm width collar is installed in MGPM20-50A. C dimension is 112 mm. Example Note) Intermediate strokes (by the 1 mm interval) with a special body are available by made-to-order. 6-17-80 63 Made to Order Common Specifications: -XC20: Head Cover Axial Port Symbol -XC20 25 Head Cover Axial Port Head side port position is changed to the axial direction.

VN-OMP0002

411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.

3 Port Air Operated Valve Series SYJA300 1

5 Body type V For vacuum and low pressure (50A) 2 Specifications Fluid Air N.C. only (N.O. only for vacuum) Type of actuation For general purpose Operating pressure range 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Refer to the graph of pilot pressure.

PA3145/3165/3185

5 Body type V For vacuum and low pressure (50A) 2 Specifications Fluid Air N.C. only (N.O. only for vacuum) Type of actuation For general purpose Operating pressure range 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Refer to the graph of pilot pressure.

VP3145/3165/3185

) 1 VQZ 04 06 10 12 14 20 VZ Option (32A) 1 4 1 (40A) 1 2 1 Coil rated voltage VS 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100 VAC, 50/60 Hz 200

Fluid temperature from 1 to 60°C; Port size: 1/4 to 1 inch, Flange: 32A to 50A; Other options: applicable to deionized water, oil-free, port threads, bracket; Series 25A-VXD is compatible with secondary battery applications

Fluid temperature from 1 to 60°C; Port size: 1/4 to 1 inch, Flange: 32A to 50A; Other options: applicable to deionized water, oil-free, port threads, bracket; Series 25A-VXD is compatible with secondary battery applications