Table of Contents

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

ZP

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

1

CJ1 Series MB Series MB1 Width across flats MA CJP MM Width across flats MA ZZ MM ML MH MI Bore size (mm) MK MA ZZ MM ML MH MI MK Bore size (mm) MA 32 40 50 63 80 100 175 10 18 44 24 10 21 32 40 50 63 80 100 175 10 18 44 24 10 21 CJ2 M I 183 14 20 48 32 12 27 183 14 20 48 32 12 27 205 18 21 53 38 15 32 205 18 21 53 38 15 32 ML + Adjustment CM2 Stroke MK 205 18 21 53 38 15 32 205 18 21 53

Table of Contents

SB) AI (3-3.2) Section SD SD Auto switch mounting groove dimensions (2 locations) MHSJ3-16D MHSJ3-20D MHSJ3-25D 4 4 5 4 6 5 3 6.5 5 3 3 20 20 5 5 90 90 20 20 20 20 (mm) HA 44 50 59 HB 36 42 50 AI 39 42 47 CB 14 14 17.5 DC 17.5 20 23.5 FX 12 15 18 NB 0 0.030 0 0.030 0 0.030 B 30 36 42 EO 9.5 10 12.5 CA 7 7 7.5 EC 7.5 8 9.5 K 4 5 6 AE 27 28 32 Q 6 7 8 DO 19.5 22 26.5 J 10 12 14 AA 46 49 55

Made to Order

66 44 20 64 10.5 7 75, 100 157.5 40.5 63 50 or less 155 36 165 46 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 165 46 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14

5

Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH Z* DDH10 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14

Air Slide Table

85 174.5 8 4 147 159 MXQ8B-100Z 36 14 66 36 100 42 110 199.5 10 5 172 184 MXQ 8BL-mZ Symmetric type 2 x M3 x 0.5 thread depth 5 13 20 27 40 42 21.7 Pilot port side 23 * Dimensions other than those listed above are the same as those for the standard type. 59 Air Slide Table/Low Thrust with High Rigidity Type MXQB Series Dimensions: MXQ 8B [Adjuster Option] MXQ 8B-m With adjuster option (8

Fluoropolymer Piping Equipment

TL TIL Dimensions TLM TILM Union Flange: LQ3F TD TID TH TIH Metric Size (S) Model E E H L1 L1 L2 L2 M P Q R S T W N Min. port size LQ3F22 17 16 16 32.1 30.9 56.1 54.9 20 58 42 43 14 10 14 4 4 LQ3F42 24 22 24 49 46.8 73 70.8 29 58 42 43 14 10 22 9.5 9.5 LQ3F43 69 LQ3F51 26.5 24 32 58 55.3 80 77.3 37 53 42 43 12 10 30 16 16 LQ3F52 82 79.3 58 14 LQ3F53 69 LQ3F62 30 26 41 68.5 64.2 92.5 88.2

ZP

ZPY25D10--A10 59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131 20 23 28 14 24 1.7 1.8 4 42 51 ZPY25 -A10 U C ZPY25D30--A10 79 141 25 ZPY32 -A10 U C 77 ZPY25D40--A10 89 177 42.5 32 35 14.5 24.5 2.3 4.5 99 187 ZPY25D50--A10 Dimensions by Stroke Dimensions by Tubing 20, 25 32 H Model F G F G Model J K L U C U C U C U C ZPY-4-A10 ZPY 10--A10 5 1.8 14.5 87 53.5 53 87.5 23 ZPY-6-A10

Modular Design with Uniform Body Style

42 AC20-D E310T-D 12 53 53 AC30-D E410T-D 15 71 71 AC40-D B C A Caution on Mounting Pipe threads are not provided on the face which connects with the other components.

KJ

54 58.5 59 60 23 29 42 24 30 42 53 51 60 82 71 74 91 118 113 125 14 4 10.4 13.4 16 13.4 D1 17 14 6 12.8 13.4 17 13.4 24.5 L3 D2 17 L2 19 8 15.2 17.6 18.5 15.9 28.5 Connection thread (With seal) 21 10 21 18.5 20.6 21 19.2 31.5 12 26 20.9 25.2 22 21.6 34 Reference dimensions after R thread installation.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5 95 95 118 123.5 125.5 144 169.5 169.5 202.5 206 38.5 22 3.5 15 7 36 49 45 25 3.5 16 8 44 58 54.5 30 4 16.5 8.5 54 71 70.5 40 5 22 11 66 86 2-TD8 (Pin O.D.)

Table of Contents

AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 40 40 28 11 11 1/8, 1/4 AKM2000 1/8, 1/4 53 48 34 14 13 AKM3000 AKM4000 70 54 42 18 15 1/4, 3/8 Note) Not applicable to AC40-06. Refer to the attachment table on page 14-2-12 or 14-2-16 for standard bypass port sizes applicable to AC.

Table of Contents

38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-7 SYJ3000-14-6 SYJ3000-14-2 Note) Please insert the protrusion for positioning of the manifold gasket into the hole of the valve body completely.

ZP

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

Air Cylinder

14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14

7ND9071en

L 13 L NOTE 8 L 14 L+ 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 15 L 16 L+ L+ 16 17 L L+ 18 Notes 1.

ZP

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.