Fieldbus System

L6 5.5 L2 DIN rail holding screw (For DIN rail mounting) 8 47 1.5 DIN rail holding screw (For DIN rail mounting) 2 x M4 mounting hole Light/surge voltage suppressor Marker groove 1 0 5.1 5.5 1.7 A B A B A B A B A B 3 2 92.6 14 A 14 A 14 A 14 A A 14 35 83 106 90 60.5 0 1 5 4 40.9 PWR 2 3 8 4.6 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT 53 7 8 8 4.6 ( ) C6: 3.6 N7: 7.4 (4.9) FE terminal 36.7

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 Manifold S kitSV5Q21, #6 Valve 2 position single SV5Q21, #7 2 position doubleSV5Q21, #8 3 position SV5Q21, #8 Dustproof SI unit: L5=16+108, L6=L3+25, L7=L4+25 Dust tight/jet proof SI unit: L8=16n+118.5, L9=16n+131 L10=L3+50, L11=L4+50 Dimensions (mm) Equation L1=16+53, L2=16+83 n: Station (Max. 16) L n 2 3 4 5 6 7 8 9 10 11 12 13

Environment

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 56 Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

Integrated Controller

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 14 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) These graphs show the amount of allowable overhang (guide unit) when the center of

SZ3000

SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Vacuum Unit

When selecting the number, refer to L6 in dimension table on pages 39 to 41. VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

SV

L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

Electric Actuator/Slider Type

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 48 Series LEJ This graph shows the amount of allowable overhang when the center of gravity of the workpiece overhangs in one direction.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 0 1 2 3 4 5 0 5 10 15 Work load [kg] Work load [kg] Work load [kg] 684 A Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

0.4

CM Note 1) L3 L4 L6 L8 L5 B3 B4 B6 B8 B5 Metric size Inch size Note 10) G1, G2, or G3 cannot be combined with N.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

15

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.

Shock Absorbers and Rate Controls

91$53 (rR)0tM% 8.612.7 60.57 6.2 \7 '' 41.4 Rttt42xl.5 M52940053 (Ln)0Il,lr.5M 8.6t2.7 60.57 6.2 57 .2 41.4 M8 260 Rt[E5x2 M5ffim530$13.0 13.519.1r0 t.5127.0 101.6 1b.2 Lil S A lciimensions in millimeters. qiffi.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note C6: With 6 One-touch fitting Supply/Exhaust block assembly C6 C8 SZ3000-50-2A1 C8: With 8 One-touch fitting For D side End block assembly SZ3000-53-3A SZ3000-53-4A SZ3000-114-3A SZ3000-114-1A VZ1000-11-12 For U side End block assembly 3 Bushing assembly 4 Bushing assembly 5 DIN rail Refer to page 7. 6 Manifold station expansion Station expansion is possible at any position. 1.

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

VHK

B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2

KJ

inch) Connection thread UNF NPT Min. port size D Note) Weight (g) Model L1 L2 M KQ2F01-34 KQ2F01-35 KQ2F03-34 KQ2F03-35 KQ2F07-34 KQ2F07-35 KQ2F07-36 KQ2F09-34 KQ2F09-35 KQ2F09-36 KQ2F11-35 KQ2F11-36 KQ2F11-37 KQ2F13-36 KQ2F13-37 1 8 1 8 26.5 30.5 27 31 27.5 31 33.5 29 32.5 34.5 34.5 36.5 40.5 36.5 41 11.5 14.5 11 13.5 10.5 13.5 15.5 10.5 13.5 13 16 26 15 24 17 25 44 18 26 38 30 48 52 48 53