0.4

VVQ1000-50A-N7 Applicable tubing 5/16" VVQ1000-51A-N9 Note) A-side energization: A light (Orange) illuminates.

42

73.2 (78.7) 59.5 53 59.5 4(A) port 17.5 13.5 2(B) port 4(A) port 17.5 13.5 2(B) port Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2 x 6.5 Mounting hole 35 2 x 6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 1/8" PE. port 1/8" External pilot port 1/8" PE. port

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

PFxx-OMJ0005CN

C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

Compact 5-Port Solenoid Valve

Refer to pages 69, 70, and 81 for dimensions when L6 and b are used for the calculation formula. Refer to the reference pages shown in the table to the right for dimensions that are not specified in each wiring specification.

Table of Contents

L6 L3 L4 AS H H ASP (Width across flats) (Width across flats) ASN D3 D3 AQ A1 A1 ASV L5 L5 A2 A2 AK ASS T T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1 Weight (g) Note 5) MAX.

Table of Contents

Specifications. 5 5 12 13 13 13 15 15 16 22 22 23 24 26 42 43 43 44 44 45 48 49 49 50 50 51 53 53 54 55 57 57 58 59 60 64 64 65 66 69 70 70 71 72 75 76 76 77 78 79 82 84 85 86 86 86 88 89 95 95 96 96 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com How to Order.

Battery-less

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 0 5 10 15 20 25 30 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 17 Model Selection LEF Series Battery-less Absolute (Step Motor 24 VDC) * These graphs show the amount of allowable overhang (guide unit) when the center of gravity

2

EXH Specifications Model Port size Specifications Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 37.5 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH IN OUT OUT EXH

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Air Fittings & Tubing

KQ2ZD08-03S 28.5 55.5 58 59 62 47.5 52 53 54 21 KQ2ZD08-04S 26.5 KQ2ZD10-02S 111 10 21 27.5 KQ2ZD10-03S 21 18.5 20.6 29 19.2 18.5 30.5 KQ2ZD10-04S 128 178 167 179 64.5 58.5 59 60 28.5 KQ2ZD12-02S 12 65.5 29.5 KQ2ZD12-03S 26 22 20.9 25.2 32 21.6 20.9 68.5 32.5 KQ2ZD12-04S Reference dimensions after R(PT) thread installation.

Environment

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 56 Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

Integrated Controller

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 14 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) These graphs show the amount of allowable overhang (guide unit) when the center of

SZ3000

SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Vacuum Unit

When selecting the number, refer to L6 in dimension table on pages 39 to 41. VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

Electric Actuator/Slider Type

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 48 Series LEJ This graph shows the amount of allowable overhang when the center of gravity of the workpiece overhangs in one direction.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 0 1 2 3 4 5 0 5 10 15 Work load [kg] Work load [kg] Work load [kg] 684 A Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03