7.5

F1 F1 F1 F1 One-touch fitting [1(P) release pressure port] Applicable tubing O.D: 8, 5/16" 20.5 6.2 One-touch fitting (X: External pilot port) Applicable tubing O.D: 4, 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D: 4, 5/32" 46.5 (with plug) F1 release pressure side Filter body assembly F2 vacuum pressure side Filter body assembly When with-plug is selected.

Mechanically Jointed Rodless Cylinder Series MY1

MY2C MY2H Load mass (kg) m1 MY3A MY3B Caution MY3M The cylinder should be mounted in m1 orientation if maximum dustproofing is required. m2 m3 Moment (Nm) M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 L2 L1 L3 Maximum Load Mass Select the load from within the range of limits shown in the graphs.

Stability of suction position,

Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

SX

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(R)G -01T 2 3.4 Mounting holes M5 x 0.8 External pilot port 53 14.5 14.5 (Only external pilot type (R)) R3.5 8.5 12 X A 2 10 24 1 P 3 R Manual override 34 41 3.5 (Lead wire length) 38.5 300 Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115

Base Mounted Metal Seal/Rubber Seal Series VQ

.: MELSECNET/MINI-S3 Data Link System B C D E F1 G H J1 J2 K Q R1 R2 V OMRON Corp.: SYSBUS Wire System SHARP Corp.: Satellite I/O Link System Matsushita Electric Works: MEWNET-F System NKE Corp.: Uni-wire System (16 output points) (2) Max.16 stations Kit S Rockwell Automation: Allen Bradley Remote I/O (RIO) System NKE Corp.: Uni-wire H System SUNX Corp.: S-LINK System (16 output points) SUNX

VFS

Base type 01, 01T, 10: 2 to 15 stations 01C, 01F: 2 to 8 stations Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) Stacking type Integrated type Nil 1 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Symbol Note) Stacking type: Base type 01, 01T Integrated type: Base type 01T, 01C, 01F Passage Porting specifications B, A EA, EB P Thread type

0.4

Standard: EX120-SUW1 F1 NKE Corp.: Uni-wire System Dust-protected: EX120-SUW1-XP Standard: EX120-SUH1 H NKE Corp.: Uni-wire H System Dust-protected: EX120-SUH1-XP Standard: EX120-SSL1 SUNX Corp.: S-LINK (16 outputs) J1 Dust-protected: EX120-SSL1-XP Standard: EX120-SSL2 SI Unit Part No. (With option W) SUNX Corp.: S-LINK (8 outputs) J2 Symbol Protocol SI unit part no.

1

F2 button ( ) 6 o Functions in accordance with on-screen display or instructions. 7 F1 button ( ) t i On the selection screen, goes back to the previous screen.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Nickel plated Chromium molybdenum steel Hexagon socket head cap screw @1 Aluminum alloy Switch mounting rail @2 Note) Brass for 6, 10 and 15 8-15-53 53 Series CY1S Dimensions Slider type/Slide bearing CY1S6/10 4-J x K (Depth) 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Valve Single Unit

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Valve Single Unit

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

REA/REB

Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

Table of Contents

F1 F1 12-5-20 21 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Construction !

SJ3A6

F1 F1 F1 F1 One-touch fitting [1(P) release pressure port] Applicable tubing O.D: 8, 5/16" 20.5 6.2 One-touch fitting (X: External pilot port) Applicable tubing O.D: 4, 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D: 4, 5/32" 46.5 (with plug) F1 release pressure side Filter body assembly F2 vacuum pressure side Filter body assembly When with-plug is selected.