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> Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32")

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

VQ4000

.: Uni-wire H System 1 to 16 stations Kit L Kit L BB C D F1 J1 J2 K Q R1 R2 U V G H 3 to18 stations SD S Simple specials are available with SMC Simple Special System.

PFxx-OMJ0005CN

C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: N9 (ø5/16" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector w/Cover, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: ø5/16" One-touch Fitting, Inch, Thread Type: Rc, Bracket: w/Foot Bracket, 2-position, Single Only

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector w/Cover, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: w/Foot Bracket, 2-position, Single Only

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: N7 (ø1/4" One-touch Fitting, Inch)

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector w/Cover, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: ø1/4" One-touch Fitting, Inch, Thread Type: -, Bracket: -

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F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

MY1

MY1 HT m2 m3 MY1 W MY1 W Moment (Nm) M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 MY2C L2 L1 L3 Maximum Load Mass MY2 H/HT Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

AC

AR1 (Exhaust air) PB (Supply air) ON state PA (Supply air) BR2 (Exhaust air) { Immediately after turning on F1> F2: See figure 3. Thereafter F1 = F2: See figure 2.

Table of Contents

Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

Stability of suction position,

Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Nickel plated Chromium molybdenum steel Hexagon socket head cap screw @1 Aluminum alloy Switch mounting rail @2 Note) Brass for 6, 10 and 15 8-15-53 53 Series CY1S Dimensions Slider type/Slide bearing CY1S6/10 4-J x K (Depth) 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

REA/REB

Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table