Actuation: 3-Position Closed Center, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: w/Side Bracket

Actuation: 3-Position Exhaust Center, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: w/Side Bracket

Compact Vacuum Unit Ejector/ Vacuum Pump System

Pressure Sensor Assembly 53 Vacuum Pressure Switch Assembly 54 Troubleshooting 55 1 - Doc. no.

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Load (kg) m1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m4 m2 m3 Moment (Nm) F3 M3=F3 x L3 L3 F1 M1=F1 x L1 F2 M2=F2 x L2 L1 L2 1.

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

AC

F2: The force that is created by the port A pressure (PA) that passes through the feedback passage and acts on the spool surface, and the spring force. OFF state { F1< F2 condition: See figure 1. AR1 (Exhaust air) PB (Supply air) ON state PA (Supply air) BR2 (Exhaust air) { Immediately after turning on F1> F2: See figure 3. Thereafter F1 = F2: See figure 2.

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Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

Electric Actuators

Refer to page 100 for part numbers. 53 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order G NA 1 F W X10 Stroke 2 LJ1H20 Cable entry direction Top entry Cable entry direction Power supply voltage Motor specification Matsushita Electric Industrial Co., Ltd.

LJ1H

Applicable strokes: 150, 250, 350, 450 Example) LJ1H1011PB-150-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model Performance 0.02 AC servomotor (50W) Incremental system Ground ball screw 12mm, 12mm lead High rigidity direct acting guide With coupling LC1-1B1H(Refer to page

7.5

With light/surge voltage suppressor Note) D: Push-turn locking slotted type Note) The electrical connection will be +COM. spec. 75 Series SJ3A6 Dimensions SS3J3-V60U/D/B Stations One-touch fitting [3/5(E) vacuum pressure port] Applicable tubing O.D: 8 (Pitch) P = 10 M5 x 0.8 [2(B) vacuum pad port] 23.6 12.8 15.6 23.8 3/5 (With needle fully opened 62.8) F2 F2 F2 F2 F2 30.6 46.2 1 2 2 2 2 2

Mechanically Jointed Rodless Cylinder Series MY1

MY2C MY2H Load mass (kg) m1 MY3A MY3B Caution MY3M The cylinder should be mounted in m1 orientation if maximum dustproofing is required. m2 m3 Moment (Nm) M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 L2 L1 L3 Maximum Load Mass Select the load from within the range of limits shown in the graphs.

Stability of suction position,

Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

MY1

MY 500 500 500 Load weight (kg) m1 CY 300 300 300 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MY1HT63 CX Moment (Nm) Moment (Nm) Moment (Nm) MY1HT63 MY1HT63 m2 m3 Moment (Nm) D100 100 100 MY1HT50 MY1HT50 MY1HT50 M2 = F2 x L2 F3 M3 = F3 x L3 F2 M1 = F1 x L1

Modular F.R.L. Units

EXH Flow Rate Characteristics Model Port size Flow rate characteristics Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH

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Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

LJ1H

Refer to page 100 for part numbers. 53 54 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 G NA 1 F W X10 Cable entry direction Top entry Cable entry direction Power supply voltage Motor specification Matsushita Electric Industrial Co., Ltd.

ZP

Product Precautions p. 165 26 Variations Basic Pad ZP Series Vacuum inlet direction Flat type Flat type with ribs Bellows type Thin flat type Thin flat type with ribs Deep type Vacuum inlet direction Single unit p. 32 p. 51 p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53