Series SV

Specification SV2000 SV1000 Applicable series SV4000 SV3000 Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

45

U D B C4 C6 C8 (Rail mounting hole pitch 12.5) 1-6-133

45

SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 SX5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" SX5000-50-1A-C6 SX3000-50-1AManifold block assembly q (Inch size) N3: With One-touch fitting for 5/

5 Port Solenoid Valve Series SV1000/2000/3000/4000

A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M Symbol F1 H J1 J2 Q R1 R2 V ZB ZBN Protocol type SI unit part no.

SJ3A6

11-1-l EX180-ll SJ3000-53-2A 4 5 6 Refer to page 61.

CATALOG

NAR3001 1/4 3/8 53 127.5 35 53 29.5 41 40 46 6.5 8 53 2.3 42.5 NAR4001 1/4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 52.5 Courtesy of Steven Engineering, Inc. !

0.4

fitting assembly VQC 1/2 C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 23 P = 22 L1 L2 L3 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) (For C6, C8) ( 9.5) VQC 4/5 DIN rail clamp screw 2 x M4 mounting hole 4.5 2 x M6 mounting hole VQZ IN IN IN IN 37.5 5.5 SQ (5) 69.5 (40) 6.5 58 10.5 80 Residual pressure release manual override VFS (For C6, C8

SV

Manifold Specifications SV1000 SV2000 SV3000 SV4000 Applicable series Manifold type 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) Max. number of solenoids Tie-rod base manifold Common SUP, EXH 20 stations 32 points 1(P), 3/5(E) port C8, N9 C3, C4, C6 N1, N3, N7 C10, N11 C4, C6, C8 N3, N7, N9 C12, N11 C6, C8, C10 N7, N9, N11 C12, N11, 03 C8, C10, C12 N9, N11, 02, 03 Port size 4(A)

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

V

Normally Closed 14 or less 18 or less Maximum 12.6 (0.7) Rubber VQZ235 53 Normally Closed 15 or less 20 or less Diameter 10 (0.55) Metal VQZ225 53 Normally Open 14 or less 18 or less 12.6 (0.7) Rubber VQZ245 53 Normally Open 15 or less 20 or less Note 2) 16.2 (0.9 VQZ300 Metal VQZ315 77 Normally Closed 17 or less 22 or less Weight 21.6 (1.2) Rubber VQZ235 77 Normally Closed 25 or less 33

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Valve Single Unit

C6 Cylinder port size SX3000 C6: With One-touch fittings for 6 Manifold base (5 stations) SX5000 SS5X3-41-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

MY1

WX S 1.1 8.4 Bottom side (section ZZ ) piping (applicable O-ring) 2-4 Y Port sizes for bottom side centralized piping (mm) Y Applicable gasket Model S WX MY1 W16G MY1 W20G 6.5 30 9 C6 8 32 6.5 93 (Machine the mounting side according to the sizes above.)

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

M-E05-1-LQ1

19 x 16 5-19 LQ1-5N19 LQ1-5B19 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-TT3 5 5-19 LQ1-5N19 LQ1-5B19 Tubing extensions 19 x 16 LQ1T51-TT4 5 Tubing extensions 19 x 16 5-19 LQ1-5N19 LQ1-5B19 LQ1T61-TT1 6 6-25 LQ1-6N25 LQ1-6B25 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT2 6 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT3 6 6-25 LQ1-6N25 LQ1-6B25 Tubing

V100

PVT317-53-1A 1 pc.

Digital Flow Switch (Integrated display type)

11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-01(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N1(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F1(-L) 88 17 21 2.8 depth 6.2 -102No.PF-OMW0007-E PF2M7#S-C4/C6/C8/N7(-L) (mm) Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) Applicable tubing O.D. C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

Table of Contents

C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Description SY3000 SY5000 Note SY3000 (Metric size) C4:With one-touch fitting for 4 C6:With one-touch fitting for 6 (Inch size) N3:With one-touch fitting for 5/32 N7:With one-touch fitting for 1/4 SY5000 (Metric size) C4:With one-touch fitting for4 C6:With one-touch fitting for 6 C8:With one-touch fitting for 8 (Inch size) N3:With one-touch fitting for5/32 N7:With one-touch fitting for1/4