42

73.2 (78.7) 59.5 53 59.5 4(A) port 17.5 13.5 2(B) port 4(A) port 17.5 13.5 2(B) port Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2 x 6.5 Mounting hole 35 2 x 6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 1/8" PE. port 1/8" External pilot port 1/8" PE. port

VQZ1000/2000/3000

, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5 39.5 Residual pressure

SYJ300/500/700

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

7.5

11-1-l EX180-ll SJ3000-53-2A 4 5 6 Refer to page 61.

SYJ3000/5000/7000

C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model

A

Bore MM *NA P S W X Y LC LD LH LS LT LX LZ Without gaiter (mm) H ZZ 20 M8x1.25 24 1/8 77 10 15 7 4 5.5 20 53 3 32 44 35 147 25 M10x1.25 29 1/8 77 10 15 7 4 5.5 22 53 3 36 49 40 157 32 M10x1.25 36 1/8 79 10 16 8 4 6.6 25 53 3 44 58 40 159 40 M14x1.5 44 1/8 87 10 16.5 9 4 6.6 30 60 3 54 71 50 187 50 M18x1.5 55 1/4 102 17.5 22 11 5 9 40 67 4.5 66 86 58 218 63 M18x1.5 69 1/4 102 17.5 22 13 5

V

Normally Closed 14 or less 18 or less Maximum 12.6 (0.7) Rubber VQZ235 53 Normally Closed 15 or less 20 or less Diameter 10 (0.55) Metal VQZ225 53 Normally Open 14 or less 18 or less 12.6 (0.7) Rubber VQZ245 53 Normally Open 15 or less 20 or less Note 2) 16.2 (0.9 VQZ300 Metal VQZ315 77 Normally Closed 17 or less 22 or less Weight 21.6 (1.2) Rubber VQZ235 77 Normally Closed 25 or less 33

SYJ300/500/700

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Local Area: (800) 258-9200-www.stevenengineering.com VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1/4 1/4 1/4 VZ52 Note) Value at manifold base mounted, 2 position

5 Port Solenoid Valve Series VQZ1000/2000/3000

) Example VQZ2120-5M1-C6 U side 1 Stations VQZ2220-5M1-C6 VQZ2320-5M1-C6 VV5QZ22-05C 1 set (C kit 5-station manifold base part no.)

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3160-5CU-C6 2 sets (Single solenoid part no.) SJ3260-5CU-C6 2 sets (Double solenoid part no.) SJ3260-5CZJ-C6 1 set (Double solenoid, with switch part no.) SJ3260-5MZ-C6 1 set (Double solenoid, individual wiring/lead wire length 300 mm part no.) The number of the blanking block assembly is also included.

3 Port Air Operated Valve Series SYJA300

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

SX

C6 Cylinder port size SX3000 C6: With One-touch fittings for 6 Manifold base (5 stations) SX5000 SS5X3-41-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

Base Mounted Metal Seal/Rubber Seal Series VQ

C3, C4, C6, M5 C6 T1 U side D side Stations 3 2 1 Terminal no.

0.4

fitting assembly C6: 6 one-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 23 P = 22 L1 L2 L3 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) (For C6, C8) ( 9.5) DIN rail clamp screw 2 x M4 mounting hole 4.5 2 x M6 mounting hole IN IN IN IN 5.5 (5) 69.5 (40) 6.5 58 10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n D side U side (33) (59.5) 58

Compact 5-Port Solenoid Valve

6.5 mm, and 9 mm for C6.

5 Port Solenoid Valve

: VQC530 0 1 3-position exhaust center: VQC540 0 1 3-position pressure center: VQC550 0 1 Indicator light Indicator light 2 73 (78.5) 121.8 59.5 194.8 (200.3) 91.7 121.8 213.5 2 105.8 4(A) port 17.5 105.8 59.5 13.5 2(B) port 13.5 (B port) (A port) 17.5 SMC 2 4 2 4 SMC A B A B 66 53 40 53 66 40 A B A B 1 3 5 14 12 14 5 1 3 12 35 53 2 x 6.5 Mounting hole 2 x 6.5 Mounting hole 53 35 Manual override

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C6: 6 (SMC) N7: 1/4" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D. C6: 6 (SMC) N7: 1/4" (SMC) Applicable tube O.D.