VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series SV

L dimension Weight (g) 460.5 448 435.5 423 410.5 398 385.5 373 360.5 585.5 573 560.5 548 535.5 523 510.5 498 485.5 473 610.5 598 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 105.4 103.1 100.9 98.6 96.4 94.1 91.9 89.6 87.4 85.1 109.9 107.6 62 61 60 59 49 58 48 57 47 56 46 55 45 54 44 53 43 52 42 51 50 No.

Air Fittings & Tubing

KQ2ZD08-03S 28.5 55.5 58 59 62 47.5 52 53 54 21 KQ2ZD08-04S 26.5 KQ2ZD10-02S 111 10 21 27.5 KQ2ZD10-03S 21 18.5 20.6 29 19.2 18.5 30.5 KQ2ZD10-04S 128 178 167 179 64.5 58.5 59 60 28.5 KQ2ZD12-02S 12 65.5 29.5 KQ2ZD12-03S 26 22 20.9 25.2 32 21.6 20.9 68.5 32.5 KQ2ZD12-04S Reference dimensions after R(PT) thread installation.

Fieldbus System

L6 5.5 L2 DIN rail holding screw (For DIN rail mounting) 8 47 1.5 DIN rail holding screw (For DIN rail mounting) 2 x M4 mounting hole Light/surge voltage suppressor Marker groove 1 0 5.1 5.5 1.7 A B A B A B A B A B 3 2 92.6 14 A 14 A 14 A 14 A A 14 35 83 106 90 60.5 0 1 5 4 40.9 PWR 2 3 8 4.6 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT 53 7 8 8 4.6 ( ) C6: 3.6 N7: 7.4 (4.9) FE terminal 36.7

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 Manifold S kitSV5Q21, #6 Valve 2 position single SV5Q21, #7 2 position doubleSV5Q21, #8 3 position SV5Q21, #8 Dustproof SI unit: L5=16+108, L6=L3+25, L7=L4+25 Dust tight/jet proof SI unit: L8=16n+118.5, L9=16n+131 L10=L3+50, L11=L4+50 Dimensions (mm) Equation L1=16+53, L2=16+83 n: Station (Max. 16) L n 2 3 4 5 6 7 8 9 10 11 12 13

Environment

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 56 Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

Integrated Controller

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 14 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) These graphs show the amount of allowable overhang (guide unit) when the center of

SZ3000

SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Vacuum Unit

When selecting the number, refer to L6 in dimension table on pages 39 to 41. VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

SV

L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

Electric Actuator/Slider Type

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 48 Series LEJ This graph shows the amount of allowable overhang when the center of gravity of the workpiece overhangs in one direction.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 0 1 2 3 4 5 0 5 10 15 Work load [kg] Work load [kg] Work load [kg] 684 A Model Selection LEFB Series AC Servo Motor Calculation of Guide Load Factor Mounting orientation 1.

0.4

CM Note 1) L3 L4 L6 L8 L5 B3 B4 B6 B8 B5 Metric size Inch size Note 10) G1, G2, or G3 cannot be combined with N.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

15

L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.

Shock Absorbers and Rate Controls

91$53 (rR)0tM% 8.612.7 60.57 6.2 \7 '' 41.4 Rttt42xl.5 M52940053 (Ln)0Il,lr.5M 8.6t2.7 60.57 6.2 57 .2 41.4 M8 260 Rt[E5x2 M5ffim530$13.0 13.519.1r0 t.5127.0 101.6 1b.2 Lil S A lciimensions in millimeters. qiffi.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note C6: With 6 One-touch fitting Supply/Exhaust block assembly C6 C8 SZ3000-50-2A1 C8: With 8 One-touch fitting For D side End block assembly SZ3000-53-3A SZ3000-53-4A SZ3000-114-3A SZ3000-114-1A VZ1000-11-12 For U side End block assembly 3 Bushing assembly 4 Bushing assembly 5 DIN rail Refer to page 7. 6 Manifold station expansion Station expansion is possible at any position. 1.