Table of Contents

m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

V

www.stevenengineering.com I 2.89 SOLENOID VALVES SERIES VQZ BODY PORTED TYPE M A N I F O L D O P T I O N S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 B L A N K P L A T E A S S E M B L Y BLANK PLATE ASSEMBLY VVQZ1000-10A-2 VVQZ2000-10A-2 VVQZ3000-10A-2 USED TO RESERVE A VALVE MOUNTING SPACE ON THE MANIFOLD FOR FUTURE USE M A N I F O L D O P T I O N S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. *

AS

AS22;1F-01-23(S)A 3.2 7.2 9 (9) AS22;1F-01-04(S)A 4 8.2 19.1 26.1 (26) 13.3 13 AS22;1F-01-06(S)A 19.1 6 1/8 10.4 11.6 30.6 29.2 27.5 26.1 10 (9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5

High-Precision Digital Pressure Switch

Leakage Enclosure: IP65 1 x 10-10Pam3/s 1 x 10-5Pam3/s Welded structure for sensor units and fitting parts Select from a face seal or compression fitting.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

0 B 101 kPa C 10.1 kPa Rated pressure range Range Analog output [mA] 5 20 Analog output [V] For vacuum For compound pressure 100 kPa to 100 kPa 100 kPa 100 kPa 0 to 1 MPa 0 1 MPa 0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa 50 kPa 1 0.6 4 ZSE ISE A C B A B Pressure Pressure ZSP Dimensions PS PSE56, PSE5601 02 N01 N02 ISA A 11.5 3025 37.5 24 5.5 30 24 PSE 14 B 5.1 20 5 IS ISG Air

ISE70/75/75H

DOWN OUT1 U P SET ZS-31-A Bracket Note: Mounting screws are not included.

2-Color Display Digital Pressure Switch Series ISE70/75/75H

A large bore cylinder or ejector consumes a large amount of air in operation and may experience a temporary drop in the primary pressure. This function prevents detection of such temporary drops in primary pressure as abnormal pressure.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

PSxx-OMM0002CN

Mpa A 0.8[V]3.2[mA] -51No.PS-OMM0002CN-F Z/ISE80(F)-02/N02/F02/C01/A2/B2/-* 5 4 5 -C01Rc1/8 -F02G1/4 -B2TSJ1/4 -A2URJ1/4 -52No.PS-OMM0002CN-F Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-* 4 5 5 -C01LRc1/8 -A2LURJ1/4 -B2LTSJ1/4 -53No.PS-OMM0002CN-F () ZS-24-A A () ZS-24-D A -54No.PS-OMM0002CN-F () ZS-35-A -55No.PS-OMM0002CN-F ZS-35-C 36 x n +4 x (n -1) -56No.PS-OMM0002CN-F ZS-35-B 36

Compact Manifold Regulator Series ARM5

Description 136144-S Common supply bushing 136144-K Individual supply bushing Single unit regulator / Port plug for regulator block 136144-S 136144-K Option Description None Oil-free Symbol Nil X17 A-A A A-A A 12 12 10 A A 8 8 15 15 10 516 Regulator Single Unit Type Series ARM10 How to Order ARJ AR425 to 935 Standard Type ARM10 06 B Z 1 q w e r t N AMR 1.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

We refer to these products as Z Products. These revolutionary products, whether simple or complex, provide P/A customers with superior performance and availability at a very affordable cost. Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life.

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

PSxx-OMV0003CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -36No.PS-OMV0003CN-G [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -37No.PS-OMV0003CN-G [F10] 39 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT1) (OUT2) [dUAL]2 SET () [LinE] SET () () 40 () UP DOWN () SET , (SET ) SET () [dUAL]2 SET () AbY(Z) 40 () 019 ( ) UP DOWN / () SET 1 () SET SET [F10

modular-press-e

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Modular F.R.L. Pressure Control Equipment

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !