V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

Vacuum

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Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 I ZCDUKC Male Cap porting zPf (v&uum pad !

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

ISE35 Series Dimensions ISE35-N ISE35-R 26.7 27.8 (11.3) 12.1 3.3 OUT MPa PRESSURE s (13) 1.5 (34) s PRESSURE MPa OUT (13.2) Lead wire with connector ZS-32-A Brown DC (+) Black OUT (1) Blue DC () + O 2020 128 A

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: E (Push-turn Locking Lever Type), Vacuum Pressure Sensor: V (Pressure Switch for Vacuum w/Energy Saving Function, Compound Pressure 1 Output), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: W (Lead Wire for Switch w/Energy Saving Function; Length: 2 m; Included)

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: V (Pressure Switch for Vacuum w/Energy Saving Function, Compound Pressure 1 Output), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: W (Lead Wire for Switch w/Energy Saving Function; Length: 2 m; Included)

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: V (Pressure Switch for Vacuum w/Energy Saving Function, Compound Pressure 1 Output), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: W (Lead Wire for Switch w/Energy Saving Function; Length: 2 m; Included)

Process Pump

Diaphragm Assembled in a clean room.

), Light/Surge Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector)

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector)

Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included), Option: B (Adapter Assembly for Bottom Mounting, Included)

Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

), Light/Surge Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: F (Vacuum Pressure Switch, Compound Pressure 2 Outputs), Output: A (NPN Open Collector)

Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: P (w/Unit Switching Function, Initial Value psi), Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: M (SI Unit Only, kPa), Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

), Light/Surge Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector)

), Light/Surge Voltage Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: A (NPN Open Collector), Unit: w/Unit Switching Function, Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)