VM

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

Micro Mechanical Valve Series VM1000

roller 45.5 29.2 (A) 2 Symbol 2 port 8 R port (3 port only) P.T.

JIS Standard Hydraulic Cylinder

Hs D-A44 A A 49.5 Auto switch 376 Auto Switch Mounting CH2E/CH2F/CH2H Series Auto Switch Proper Mounting Positions CHQ D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA Note2) D-A9/A9V Bore size (mm) D-G39/K39 D-A5/A6 D-B5/B64 D-A3/A44 D-F5NT D-A59W D-B59W CHK CHN A A A A A A A A A A A 32 25 21.5 26.5 17 15 19 15.5 18.5 CHM 40 26 22.5

VM

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" Flow rate (l/min (ANR)) OUT 1000 680 440 480 420 210 150 IN OUT IN High pressure Effective area (mm2) 15.2 10.4 6.7 7.3 6.4 3.2 2.3 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

) The flow rate necessary to operate a 50 cylinder at a speed of 100mm/s is 12l/min.

IIIIIII

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

Mechanical Valves Series NVM, NVFM, NVZNI

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04

VM

Construction Weight Operating pressre Ambient and fluid temperature Contacts Port size (Nominal size) VR3200-01 VR3201-01 Closed terminal (with protect case) 130g 260g 5 to 60C (No freezing) 0.1 to 1.0MPa 1ab Rc(PT) (6A) 1 8 Micro Switch Rating Non-inductive load (A) Inductive load (A) Resistance load Inductive load Light load Electric motor load N.O. N.O. N.C. N.C. N.O. N.O. N.C. N.C.

1

) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B)

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

CATALOG

1/2-13 1 1/2 1 3/8 2.34 1 4 1/4 2.72 2 7/16 5/8 2 5/8 5 53/64 3/4-16 7/8 1/2 2 1/4 400 (4) 1 1/8 4.7 1 1/2 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1.18 1/2-13 2 1/16 1 3/8 2.34 1 4 1/4 2.72 2 7/16 5/8 2 5/8 5 53/6 3/4-16 7/8 1/2 MORE DIMENSIONS S E E N E X T P A G E D I M E N S I O N S D E TA C H A B L E R E A R C L E V I S T Y P E NC A1D G BORE (INCH) KK A AA B C D DD E EA EE F L LR M XD MM CB J

Table of Contents

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

V

(ISO VG32) Port Size 1/8 H O W T O O R D E R (N)VM400 A C T U AT O R O N LY P A R T N O.

KR

(mm) A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAT23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 21 3.4 2.9 9 1 8 KAT23-M6 KAT23-U01 10 3.2 17.5 10 KAT04-M5 15.5 M5 x 0.8 M6 x 1 8 17 4.3 4.3 6 8 KAT04-M6 16 10.4 16 18 4 1 8 KAT04-U01 20 9 14 10 10 21.5 6.0 6.0 1 4 KAT04-U02 22 15 Connection thread KAT06-M5 16 M5 x 0.8 M6 x 1 18 4.3 4.3 8 7 8 KAT06

RLQ

Hs A B A B Proper Auto Switch Mounting Position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W Bore size (mm) B B A A B A B A 32 3 11 51 43 6 46 5.5 45.5 40 5.5 13.5 49.5 57.5 8.5 52.5 8 52 50 19 11 53.5 61.5 14 56.5 13.5 56 63 22 14 59 67 17 62 16.5 61.5 Auto Switch Mounting Height (mm) D-A7H, A80H D-F7, J79, F7W D-J79W

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A B A B Proper auto switch mounting position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W D-F7LF Bore size (mm) B B A A B A B A B A 32 11 10 50 51 3 43 6 46 5.5 45.5 40 13.5 12.5 56.5 57.5 5.5 49.5 8.5 52.5 8 52 50 18 19 61.5 60.5 11 53.5 14 56.5 13.5 56 63 22 21 67 66 14 59 17 62 16.5 61.5 Auto switch mounting height

CLK1

Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx. Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...)

Clamp Cylinder with Lock Series CLK1

Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx. Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...)

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.