ZP

51.5 E 23 F 61.5 99.5 109.5 145.5 155.5 10 20 30 40 50 3 3 51 M10 x 1 (F) 77 M5 x 0.8 6 8 Dimensions Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030WK -B5 ZP2-T5030WK -B5 ZP2-T6030WK -B5 ZP2-T8030WK -B5 C 0.5 30 31 2 x 2.5 0.8 19 Series ZP2 Oval Pad: With Buffer (Vacuum Inlet Direction: Vertical) Dimensions: With Buffer ZP2-T WK 04 06 ZP2-T 20 WK 04 06 H H Width across flat J (Hexagon

VFS

2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Modular F.R.L. Unit

-06 02 03 04 06 E400E500-06 Piping adapter Note 5) E20001 02 03 E30002 03 04 E30002 03 04 02 03 04 06 IS1000E-40 Pressure switch with piping adapter Note 5) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Cross interface Note 5) Y2401 02 Y3401 02 Y3401 02 Y4402 03 Y5403 04 Note 1) in part number for the round pressure gauge indicates a type of connection thread.

Proposals for Energy Saving

OUT(2) Rc G NPT NPTF Nil F N T 1 IN(1) Port size Fluid Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Symbol 02 03 04 06 Class 3 Class 2 Class 4 Nil A General air Dry air Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm ) Symbol 3 4 5 7 10 Class 4 Class 3 Class 2 3 4 5 7 10 Consult SMC regarding other voltages.

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted !

Speed Controller with Indicator

5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

A

R S T R O K E ( I N C H) S E A L K I T S 6 .CY2B6-PS 10 .CY2B10-PS 15 .CY2B15-PS 25 .CY2B25-PS 32 .CY2B32-PS 40 .CY2B40-PS Bore Size Standard Stroke (inch) Maximum Stroke (inch) 6 2, 3, 4, 5, 6, 8, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 40 N O N-G U I D E D M O U N T I N GN U T NSNJ-015 (6/10/15) NSN-03 (25/32) NSN-04 (40) 25 5, 10, 15, 20, 25, 30, 40 80 32 5, 10, 15,

Table of Contents

10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

A

(Female) B O D Y S I Z E P O R T S I Z E 2 1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT Courtesy of Steven Engineering, Inc. !

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

Modular F.R.L. Units

T-Spacer: (T) M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Using a T-spacer facilitates the branching of air flow.

F

L D S E R I E S KM KM I N L E T C O N N E C T I O N N U M B E R O F O U T L E T S 11 One-Touch (Inch & Metric) 12 Threaded (Female) (Inch & Metric) 13 One-Touch (Metric Only) 14 One-Touch (Metric Only) 15 One Touch Fitting Rod (Metric Only) 16 One Touch Fitting Rod (Metric Only) 3 3 (KM13, 14, 15, 16) 6 6 (KM11, 12) 10 10 (KM11, 12) O U T L E T T U B E OD 03 5/32 07 1/4 09 5/16 04 4mm 06

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

smcmaintenancepartslist

5 !6 Single acting, spring extend Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS Gasket Set of left nos. !4, !5, !6. Replacement Parts: Seal Kit Kit no.

42

For manifold) 0: Plug-in sub-plate 04 1/2 Thread type SV Nil Rc F G N NPT T NPTF Enclosure Nil Dust-protected SYJ W Dust-tight/ Water-jet-proof (IP65) Sub-plate SZ 5 1 Plug-in 0 VQ5 0 1 VF 1 VQ5 5 2 5 G 1 Plug lead VP4 CE-compliant Porting specifications VQ 1/2 Type of actuation Nil Q CE-compliant Nil Side ported B Bottom ported 2-position single 3-position closed center VQ 4/5 VQ 4/5 (A

Modular F.R.L. Unit

04 01 02 VHS3002 03 VHS40-06 VHS3002 03 VHS20VHS403-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E500-06 Note 5) E200E400Piping adapter Note 5) 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Y3401 02 Pressure switch with piping adapter IS1000E-20 IS1000E-40 Y4402 03 Y5403 04 Note 5) Y24Cross interface Note 1) in part

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Y: 4.5 to 7 D: 6 to 8 5-Rc 1/4, 3/8, 1/2 (Piping port) 5-Rc 1/4, 3/8, 1/2 (Piping port) D Y ( ) : VF5144-04 : With light/surge voltage suppressor ( ) : VF5144-T-04 : With light/surge voltage suppressor 3-4-38 39 5 Port Pilot Operated Solenoid Valve Rubber Seal Series VF5000 Base Mounted: 2 Position Double Solenoid, 3 Position Closed Center/Exhaust Center/Pressure Center Grommet: VF544G02

Tamper Proof and Flat Head Screw

(Part no.: AS-T-1) 100 200 205 300 400 M5 standard 1/8 standard Applicable tubing O.D. 1/4 standard Metric sizes 23 04 06 08 10 12 Inch sizes 3/8 standard 3.2 01 03 05 07 09 11 13 1/8 1/2 standard 4 5/32 6 3/16 With One-touch fitting 8 1/4 10 5/16 12 3/8 1/2 Use 1/8 tubing.