Modular/F.R.L. Units Series AC

-02 03 3-port valve for residual pressure release Note 7) VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E500-06 Piping adapter Note 7) E100-M5 02 IS1000E-3003 04 01 IS1000E-2002 03 Pressure switch with piping adapter Note 7) Y54-03 04 Y24-01 02 Y34-01 02 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Mist Separator

: 8 Semi-standard: 8J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C3LF-8J-A C3LF-8-A G G C3LFF-8J-A NPT C3LF-8(Z)-A NPT C3LFN-8J(Z)-A Appearance and part No.

Standard Combinations

To release residual pressure, select a model with a back flow mechanism.

IDG

of a membrane air dryer.

1

OFF 45 Max. 6 ON 44 Symbol 2 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 3 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F.O.F.* 20 N T.T. 45 INDEX 330 Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A

AIR COMBINATION

AD38-A AD48-A Y100-A Y200-A Y300-A Y400-A Y500-A Spacer Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Spacer with bracket AKM2000-01-A AKM3000-(01)-A AKM4000-(02)-A Check valve Note4) Note5) AKM2000-(02)-A AKM3000-02-A AKM4000-03-A IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A Pressure switch Note5) Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A T-Spacer Note4) Note5) Y110-M5-A Y210-(02)-A Y310

AIR COMBINATION

Note5) Note6) Y110-M5-A Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A Y610-03-A Y610-(03)-A VHS40-02A VHS20-01A VHS30-02A VHS50-06A Pressure relief 3 port valve Note6) VHS40-03A VHS40-06A Attachment VHS20-02A VHS30-03A VHS50-10A VHS40-04A E400-02-A E200-01-A E300-02-A E400-03-A E600-06-A Piping adapter Note6) E100-M5-A E200-02-A E300-03-A E500-06-A E400-04-A E600-10-A E200-03-A E300-04

Air Combination

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

Title not found

Port size Accessories Synbol Poat sEe 20 30 40 Symbol Description Applicaue mooe|s 1t8 a a o a 3/8 a a 112 a With brackel AFD2010 40 Floal lype aulo drain (N C ) AFD20 to 40 3t4 a Floal type aulo drain (N O ) AFD3O,40 a a o a a a a a a a a r a a a a a AFM t,", ""0"r*TSymbol Descrjpiron Applicable mooe|s AFt\,'t2o ro 40 Body size AFM20 to 40 Ivetal bowl with levelgauqe AFM30, 40 Wdh bowl

AMX-OM-Q018E

Specifications 1) Standard dew point: -20oC, -15oC 2) Standard dew point: -40oC, -60oC Model Specifications IDG3V4 IDG5V4 IDG10V4 IDG20V4 IDG30AV4 IDG50AV4 IDG3HV4 IDG5HV4 IDG10HV4 IDG20HV4 IDG30HAV4 IDG50HAV4 AFM30-A AFM20-A AFM40-A AFM30-A AFM20-A AFM40-A Mist separator AFD40-A AFD30-A AFD20-A AFD40-A Micro mist separator AFD30-A AFD20-A Component equipment AR20-B Regulator AR40-B AR25-

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

Precision Regulator Series IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge2 G33-4-01 G43-4-01 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached two

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Process Pump

Diaphragm Assembled in a clean room.

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Table of Contents

(mm) 2R 6.5 5 4 2.5 8 I.D. (mm) H Bend the tube into U-form at a temperature of 20C. Fix one end and close loop gradually. Measure 2R when the tube breaks or is crushed.

AC

AC ARM 2500 05 A 02 G1 AV Optimal for central pressure control. AU Accessories (Options) Regulator manifold None (with plug) G1 G2 AF G33-10-01 GA33-10-01 Easily set up using the new handle. Also has a One-touch lock system. AR Body size Pressure gauge is attached, not mounted.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

A A A A 24V 0V +24V 24G DA DB DG FG R4.5 129 STATION NO.

VFS

Please connect with corresponding power side. 01 VV5FS2 1 06 01 Nil N Rc NPT NPTF G Symbol T Series VFS2000 Manifold Passage Porting specifications A, B EA, EB P F Symbol Option Port size 1 2 Side Bottom Plug-in type With attachment plug lead wire Common Common Symbol 01 02 A, B P, EA, EB 3 Side Bottom Individual Common 1 8 Rc Rc Rc M Mixed VK 4 Stations 1 4 1 4 5 Side Bottom Common Individual

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size