1

(mm) Auto Switch Mounting Height Auto switch model Band mounting D-H7l/H7lW D-H7NF D-H7BA D-C7l/C80 D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9l D-M9lW D-M9lA D-A9l D-H7C D-C73C D-C80C Hs Hs Hs Hs Hs 6 15 16 15 18 17.5 10 17 18 17 20 19.5 16 20.5 21 20.5 23.5 23 Bore size (mm) Auto switch model Rail mounting D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-F7l/J79 D-F7lW/J79W D-F7BA/F79F

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Dimensions and the most sensitive positions are same as the conventional types. s D-M9N (s-vvire, NPN output) M-F9N -^ D-W9P *8 c-"*t"*r D-FQB 17 D-MgN D-MgP Nwtypes D-MgB nil;'Y,r dCl D-MgP (3-wke, PNP output) D-MgB (2-wire) Range of load 5 t o wire:4 timesrn" New types tr{lur$ D-FgB 5 to 40mA D.M9B 2.5 to 40mn lead wire is available as siandard. 41ime6 more bl f e x b e Indicator Light:

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(metric) spaEleyonamanr'od Manifold D-sub Connector .

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

C8R VQ7 02U C10R 02B C6L EVS 03D C8L 03U C10L VFN 03B C12D C12U Size C12B 1 Size 1 VV71 02R 02D 6 6 Manifold VV72 03R 04D Size Rated coil voltage for air release valve 2 Size 2 Thread type Stations None 24 VDC 12 VDC Voltage other than above (50 VDC or less) Nil Rc G NPTF Nil 3 1 station . . . 10 stations 1 . . .

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

ITV

Approx. 172 Applicable products and accessories Applicable model ITV ITV20 ITV30 q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) AF30 AF40 IC AFM30 AFM40 B310L B410L VBA Y30 Y40 234 Y30L Y40L VE qAF40 wAFM40 VY1 G Accessory (Option)/Part No. PPA AL Flat bracket Dimensions Part no.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

Process Pump

D-DN

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 1/4, Mounting: w/o Mounting Option, Float Type Auto Drain: D [N.O. (Normally Opened)], Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Right to Left, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: D [N.O. (Normally Opened)], Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: R (Right to Left), Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: D [N.O. (Normally Opened)], Bowl Type: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: D [N.O. (Normally Opened)], Bowl Type: 6 (Nylon Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: D [N.O. (Normally Opened)], Bowl Type: 6 (Nylon Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: R (Right to Left), Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 1/4, Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

rep-modular-e

Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly. Match the mating mark of the body and the bowl assembly to insert the assembly to the body.