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Y . u , E 37 | 1/2" NPT M6 0 t 02 03 04 M 6 x 1 . 0 PT1/8 Pr1/4 PT3V8 PT1/2 a a a a a o a a a a a a a a a a a o a a a a a a a a a a a o a a a a a a a a a a a r a a a a a a a r a a a a a a a a o a r a o a a a The use of compact spacer with bracket reduces the total assembled space.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Residual pressure relief 3 port solenoid valve Applicable air combination Spacer Spacer with bracket Piping adapter Silencer wAC30-A Air filter + Mist separator + Regulator (AF30-A) (AFM30-A) (AR30-A) VP517 AC25-A, AC30-A Y300-A Y300T-A E300-03-A AN30-03 AN302-03 *1 Connection threads are not available for the residual pressure relief 3 port solenoid valve.

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

rep-modular-e

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Modular Pressure Control Equipment F.R.L. Replacement Procedure

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ITV

Avoid unnecessary disassembly or removal of parts, as this can lead to a malfunction. 6. The optional cable connector is a 4-wire type. When the monitor output (analog output) is not being used, keep the monitor output wire (black) from touching the other wires as this can cause a malfunction. 7.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

Process Pump

Diaphragm Assembled in a clean room.

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0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Setting sensitivity: 0.001 MPa Can be connected as a module to a mist separator.

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [G] G, Plumbing Thread Nominal: 3/8, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.O. Automatic Drain, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body

Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Option: D (N.O., Float Type Auto Drain), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Option: D (N.O., Float Type Auto Drain), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Standard

Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Option: D (N.O., Float Type Auto Drain), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [G] G, Plumbing Thread Nominal: 3/8, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.O. Automatic Drain, Bowl Material: [Metal with Level Gauge] Metal Case with Level Gauge, Bowl Guard

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [G] G, Plumbing Thread Nominal: 3/8, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.O. Automatic Drain, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body

Body Size: 30, Thread: G, Port Size: 3/8, Option: N.O., Float Type Auto Drain, Semi-Standard 1: 2 + R, Semi-Standard 2: Standard, Made to Order: -

Body Size: 30, Thread: G, Port Size: 3/8, Option: N.O., Float Type Auto Drain, Semi-Standard 1: Flow Direction Right to Left, Semi-Standard 2: Standard, Made to Order: -