Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

ITV

Then, a correct operation works until a vacuum pressure proportional to the input signal is reached, and a vacuum pressure is obtained which is always proportional to the input signal. Power supply Output signal i Control circuit Input signal w Atmospheric pressure solenoid valve q Vacuum pressure solenoid valve Atmospheric pressure F.R.L.

q"s

Nole 5) When mounting a blanking plate and lhe regulator with diflerent pressure set. olease inlorm SI C ol the oder ol a manifold stalion beside a purchase order, Nole) Refer to the table below tor possible mixed combination, Uod.l rvl03tr tTvl05tl tw201tr rTv203tr tw205tr tw10ltr o tw103tr o a a o tTV't05tr o o a a trv20ttr o o tTV203tr o o a a tTV205tr o o a o Pressure response wilh no

Process Pump

Diaphragm Assembled in a clean room.

rep-modular-e

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

An IR3000/3200-03-A (IR-A series precision regulator) can be mounted on an AF40-03-A or an AFM40-03-A with a Y400(T)-A modular connection bracket. IR-A series precision regulators can also be mounted with older Y400(T) and Y40(T) brackets.

An IR3000/3200-03-A (IR-A series precision regulator) can be mounted on an AF40-03-A or an AFM40-03-A with a Y400(T)-A modular connection bracket. IR-A series precision regulators can also be mounted with older Y400(T) and Y40(T) brackets.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3?m with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3 m with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.