Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

Process Pump

Diaphragm Assembled in a clean room.

Compressed Air Preparation Filter

AD27-6-A With bowl guard AD27-6C-A AD37m-6-A AD47m-6-A Normally open (N.O.) With bowl guard AD38m-6-A AD48m-6-A Automatic (Auto drain) Manual With drain cock C2SF-2-A C3SF-2-A C4SF-2-A With level gauge C3LF-8-A C4LF-8-A With drain guide (without valve function) C2SFm-2J-A C3SFm-2J-A C4SFm-2J-A With level gauge C3LFm-8J-A C4LFm-8J-A Metal Normally closed (N.C.)

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

ITV

Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Note) Refer to the table below for possible mixed combination.

An IR3000/3200-03-A (IR-A series precision regulator) can be mounted on an AF40-03-A or an AFM40-03-A with a Y400(T)-A modular connection bracket. IR-A series precision regulators can also be mounted with older Y400(T) and Y40(T) brackets.

An IR3000/3200-03-A (IR-A series precision regulator) can be mounted on an AF40-03-A or an AFM40-03-A with a Y400(T)-A modular connection bracket. IR-A series precision regulators can also be mounted with older Y400(T) and Y40(T) brackets.

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

Flow Control Equipment

Metric size 23 04 06 08 10 12 Inch size With One-touch fittings 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Use 1/8" tubing. 4.1-9 Series TMH Holder Specifications A holder for securing a speed controller (in-line style) with a One-touch fitting. 20 to 60C Ambient temperature Material Polypropylene White Color Accessory: Round head Phillips screw for mounting

q"s

Nole 5) When mounting a blanking plate and lhe regulator with diflerent pressure set. olease inlorm SI C ol the oder ol a manifold stalion beside a purchase order, Nole) Refer to the table below tor possible mixed combination, Uod.l rvl03tr tTvl05tl tw201tr rTv203tr tw205tr tw10ltr o tw103tr o a a o tTV't05tr o o a a trv20ttr o o tTV203tr o o a a tTV205tr o o a o Pressure response wilh no

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Speed Controller with

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Related Products: Holder Series TMH 1

1 Related Products: Holder Series TMH Specifications A holder for securing a speed controller (In-line type) with One-touch fitting. Ambient temperature 20 to 60C Material Polypropylene White Color Accessory: Round head Phillips screw for mounting (Black zinc chromated).

Related Products: Holder Series TMH 1

1 Related Products: Holder Series TMH Specifications A holder for securing a speed controller (In-line type) with One-touch fitting. Ambient temperature 20 to 60C Material Polypropylene White Color Accessory: Round head Phillips screw for mounting (Black zinc chromated).

Body Size: 30, Thread: N (NPT), Port Size: 03 (3/8), Option: B (Assembly of a Bracket and Set Nuts), Semi-Standard 1: 8J (8 + J), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: B (Assembly of a Bracket and Set Nuts), Semi-Standard 1: 8J (8 + J), Semi-Standard 2: Standard

Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Option: B (Assembly of a Bracket and Set Nuts), Semi-Standard 1: 8J (8 + J), Semi-Standard 2: Standard

Body Size: 30, Thread: N (NPT), Port Size: 03 (3/8), Option: B (Assembly of a Bracket and Set Nuts), Semi-Standard 1: 8J (8 + J), Semi-Standard 2: RZ (R + Z)