Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Process Pump

Diaphragm Assembled in a clean room.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

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Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Note) Refer to the table below for possible mixed combination.

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Nole 5) When mounting a blanking plate and lhe regulator with diflerent pressure set. olease inlorm SI C ol the oder ol a manifold stalion beside a purchase order, Nole) Refer to the table below tor possible mixed combination, Uod.l rvl03tr tTvl05tl tw201tr rTv203tr tw205tr tw10ltr o tw103tr o a a o tTV't05tr o o a a trv20ttr o o tTV203tr o o a a tTV205tr o o a o Pressure response wilh no

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Air Cylinder NCQ7 Series Compact Cylinder

^-'-t" +'' l' tv."' 2',Sr " ,:; . a . ' li'J.Sh.' A--T.Tr/ir.{ 8r " 4 ' l e A . a ' A . , .

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: D (Float Auto Drain, N.O., Size 31 & 41), Pressure Relief Valve: V (Downstream Valve), Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: C (Float Auto Drain, N.C., Size 31 & 41), Pressure Relief Valve: V (Downstream Valve), Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41), Handle Orientation: A (Upward Handle)

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: B (Bracket), Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 04 (1/2), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 04 (1/2), Option: D (N.O., Float Type Auto Drain), Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 04 (1/2), Option: BD (B + D), Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Standard