Vacuum System Peripherals:

q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Process Pump

D-DN

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

ITV

Approx. 172 Applicable products and accessories Applicable model ITV ITV20 ITV30 q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) AF30 AF40 IC AFM30 AFM40 B310L B410L VBA Y30 Y40 234 Y30L Y40L VE qAF40 wAFM40 VY1 G Accessory (Option)/Part No. PPA AL Flat bracket Dimensions Part no.

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

rep-modular-e

8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Series: AFM, Body Size: 40, Thread: Rc, Port Size: 1/2, Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

CATALOG

N S D O U B L E R O D E N D W I T H A U T O S W I T C H NCDRA1BW30 Courtesy of Steven Engineering, Inc. !

ZP

/One-touch fitting 10 to 16 w q ZPR N A5 04 CT 10 r Connection thread (Male thread) B Width across flats 8 F Vacuum inlet e (One-touch fitting) A5 M5 x 0.8 A6 M6 x 1 04 4 06 6 C D D Width across flats 10 Model A B C D Vacuum inlet direction q Pad dia.

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: W (Drain Cock w/Barb Fitting)

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Manual] Manual, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body: 40, Accessory:

Table of Contents

0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

ZP

(per buffer stroke) C 30 31 G H: 4 H: 6 Stroke ( ) D E F G J J Dimensions 10 20 30 40 50 11.5 21.5 31.5 41.5 51.5 23 61.5 99.5 109.5 145.5 155.5 a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model 51 ZP2-T4030WK ZP2-T5030WK ZP2-T6030WK ZP2-T8030WK 04 06 13.9 8 14.7 10 04 06 04 06 04 06 0.5 77 2 x 2.5 0.8 20 Series ZP2 Male thread mounting Female thread mounting How to Order ZP2 R 3507 W N 04 A5 Without

Table of Contents

Cassette Seal u u NBR HNBR Seal Valve i i HNBR NBR Valve O-ring o o Dimensions With silencer With exhaust port fitting Applicable tubing O.D. d Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06

ZP

(per buffer stroke) C 30 31 G H: 4 H: 6 Stroke ( ) D E F G J J Dimensions 10 20 30 40 50 11.5 21.5 31.5 41.5 51.5 23 61.5 99.5 109.5 145.5 155.5 a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model 51 ZP2-T4030WK ZP2-T5030WK ZP2-T6030WK ZP2-T8030WK 04 06 13.9 8 14.7 10 04 06 04 06 04 06 0.5 77 2 x 2.5 0.8 20 Series ZP2 Male thread mounting Female thread mounting How to Order ZP2 R 3507 W N 04 A5 Without

Table of Contents

7 0.1 2.2 8 KQ2C-08 14.1 9.2 2.9 0.1 10 KQ2C-10 17.1 11.2 0.2 12 KQ2C-12 19.1 13.2 0.2 B (Black), R (Red), YR (Orange), BR (Brown), Y (Yellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) 16 KQ2C-16 26.3 17.2 3.9 0.3 Plug: KQ2P, KQP Applicable fitting size d Weight (g) Model Note) D L A KQ2P-23 3.2 KQP-23 31.5 16 1 5 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 KQP-04 KQP-06 32

AC

AFM3000 to AFM4000-06 Combination Table/Accessory and Option Combinable Impossible Depends on the model Applicable mist separator Option Auto drain Sym Accessory/Option AFM2000 D D C 2 6 8 C J R W AFM3000 AFM4000 D D C 2 6 8 C J R W Pressure differential auto-drain Float style auto drain (N.O.)

Table of Contents

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.