IDG

of a membrane air dryer.

CATALOG

All three series, VQ, SX and SY, are c o m p a c t , l i g h t w e i g h t a n d a e s t h e t i c i n a p p e a r a n c e .

A

, d e t e r i o r a t i o n o f a c c u r a c y, a n d breakage of parts.)

CV/MVGQ

' view RE A B Breathing hole REC A-A' view CX CY MQQ M RHC Manual button MK(2) RS Q G RS H A RZQ MI W S Non-lube type Long stroke type CEP1 CE1 Component Parts CE2 Note Material Material No.

CV/MVGQ

If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

P/A as a contact protection box may be necessary.

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Process Pump

Diaphragm Assembled in a clean room.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 8R (8 + R), Semi-Standard 2: Standard

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Metal with Level Gauge] Metal Case with Level Gauge, Bowl

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Left] Right→Left, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Metal with Level Gauge] Metal Case with Level Gauge, Bowl Guard:

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Left] Right→Left, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body: 40

Body Size: 40, Thread: Rc, Port Size: 1/2, Option: N.C., Float Type Auto Drain, Semi-Standard 1: Nylon Bowl, Semi-Standard 2: Standard, Made to Order: -

Body Size: 40, Thread: Rc, Port Size: 1/2, Option: N.C., Float Type Auto Drain, Semi-Standard 1: 8 + R, Semi-Standard 2: Standard, Made to Order: -

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard