Process Pump

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more).

IDG

When using in a unit, be sure to set the air pressure to zero before using a mist separator or micro mist separator with modular connections. Also, confirm that the body and case are locked together with a click before starting the flow of compressed air. 2. Confirm tightening of the holder.

rep-modular-e

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

ITV

Type Preset Input Type Brown 1 2 3 4 1 2 3 4 Brown White Blue Black Brown White Blue Black Power supply Input signal GND (COMMON) Monitor output Power supply Input signal 1 GND (COMMON) Input signal 2 Blue Load White Black Note) A right angle type cable is also available.

Precision Regulator

Attaching a modular adapter enables a connection to the new modular connection brackets (Y200-A/Y300-A/Y400-A). 2 Air filter, mist separator, interface with bracket, etc. are not included. Order them separately.

q"s

a %silrc q"s cAT.ES60-15o Electro-Pneumatic Regu lator Sensitivitfo;, 2 Xp^(l00 kpa speciricarions) Linearity: Within *,tg6-{f.S.)

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.49

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.49

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.