Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: BC (B + C), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Process Pump

Diaphragm Assembled in a clean room.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

ITV

Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Note) Refer to the table below for possible mixed combination.

rep-modular-e

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

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Nole 5) When mounting a blanking plate and lhe regulator with diflerent pressure set. olease inlorm SI C ol the oder ol a manifold stalion beside a purchase order, Nole) Refer to the table below tor possible mixed combination, Uod.l rvl03tr tTvl05tl tw201tr rTv203tr tw205tr tw10ltr o tw103tr o a a o tTV't05tr o o a a trv20ttr o o tTV203tr o o a a tTV205tr o o a o Pressure response wilh no

An IR3000/3200-03-A (IR-A series precision regulator) can be mounted on an AF40-03-A or an AFM40-03-A with a Y400(T)-A modular connection bracket. IR-A series precision regulators can also be mounted with older Y400(T) and Y40(T) brackets.

An IR3000/3200-03-A (IR-A series precision regulator) can be mounted on an AF40-03-A or an AFM40-03-A with a Y400(T)-A modular connection bracket. IR-A series precision regulators can also be mounted with older Y400(T) and Y40(T) brackets.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3?m with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3 m with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.

This is a legacy product.