Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/4, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.O. Automatic Drain, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of

Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: BD (B + D), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Process Pump

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more).

This is a legacy product, and replaced byAM550C-06BD

This is a legacy product, and replaced byAFF11C-06BD

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/4, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Left] Right→Left, Drain Cock: [Auto Float Type] N.O. Automatic Drain, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body: 40

Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: BD (B + D), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

Series: AFM, Body Size: 40, Thread: Rc, Port Size: 3/4, Mounting: w/Bracket, Float Type Auto Drain: w/o Auto Drain, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: AFM, Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Mounting: B (w/Bracket), Float Type Auto Drain: w/o Auto Drain, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

rep-modular-e

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

ITV

Type Preset Input Type Brown 1 2 3 4 1 2 3 4 Brown White Blue Black Brown White Blue Black Power supply Input signal GND (COMMON) Monitor output Power supply Input signal 1 GND (COMMON) Input signal 2 Blue Load White Black Note) A right angle type cable is also available.

Precision Regulator

Attaching a modular adapter enables a connection to the new modular connection brackets (Y200-A/Y300-A/Y400-A). 2 Air filter, mist separator, interface with bracket, etc. are not included. Order them separately.

q"s

a %silrc q"s cAT.ES60-15o Electro-Pneumatic Regu lator Sensitivitfo;, 2 Xp^(l00 kpa speciricarions) Linearity: Within *,tg6-{f.S.)

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.49

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.49

This is a legacy product.

This is a legacy product.

This is a legacy product.