1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

Process Pump

Diaphragm Assembled in a clean room.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Compressed Air Preparation Filter

AD27-6-A With bowl guard AD27-6C-A AD37m-6-A AD47m-6-A Normally open (N.O.) With bowl guard AD38m-6-A AD48m-6-A Automatic (Auto drain) Manual With drain cock C2SF-2-A C3SF-2-A C4SF-2-A With level gauge C3LF-8-A C4LF-8-A With drain guide (without valve function) C2SFm-2J-A C3SFm-2J-A C4SFm-2J-A With level gauge C3LFm-8J-A C4LFm-8J-A Metal Normally closed (N.C.)

This is a legacy product, and replaced byAFM30-N03B-2Z-A, MIST SEPARATOR, MODULAR, AIRLINE EQUIPMENT, AFM MASS PRO, EC, AFM 3/8INCH MODULAR (NPT), .88184 lb, ModelPort sizeFluidProof pressureMaximum operating pressureMinimum operating pressureAmbient and fluid temperatureRated flow ( /min (ANR)) (1)Nominal filtration ratingOutlet side oil mist concentrationBowl materialBowl guardDrain

This is a legacy product, and replaced byAL30-N03B-3Z-A, LUBRICATOR, AIRLINE EQUIPMENT, AL MASS PRO, EC, AL MASS PRO 3/8 MODULAR (NPT), .77161 lb

This is a legacy product, and replaced byAL40-N03B-8Z-A, LUBRICATOR, AIRLINE EQUIPMENT, AL MASS PRO, EC, AL MASS PRO 3/8 MODULAR (NPT), 3.99395 lb

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: N (NPT), Port Size: 06 (3/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 1/2, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: No, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body: 40, Accessory: None, O-Ring, Gasket

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 1/2, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: No, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body: 40, Accessory: Bracket, O-Ring

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 3/4, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: No, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: Presence, Size of Body: 40, Accessory: None, O-Ring, Gasket

Body Size: 40, Thread: NPT, Port Size: 1/4, Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40, Semi-Standard 2: Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -

Body Size: 40, Thread: NPT, Port Size: 3/8, Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40, Semi-Standard 2: Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -

Body Size: 40, Thread: NPT, Port Size: 3/4, Option: Bracket, Semi-Standard 1: Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40, Semi-Standard 2: Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -

Body Size: 40, Thread: N (NPT), Port Size: 06 (3/4), Option: B (Bracket), Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)