HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

HRX-OM-S004

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control

1

(mm) Auto switch model Bore size 6 10 16 Auto switch mounting Auto switch model Bore size (mm) 6 10 16 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2 2.5 3 D-M9l D-M9lV D-M9lW D-M9lWV D-A9l D-A9lV Band mounting D-A9l 4.5 6 7 D-H7l/H7lW D-H7BA/H7NF 3 4 4 BJ6-006 (A set of a, b, d, f) BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-H7C 5 8 9 D-C7l/C80/C73C/C80C 6 7 7 D-M9lA Note 2) D-M9lAV

HRX-OM-X071

T1, T2Inverter pump . 6-2 6.4 Option YWith feet / Without rack mounting brackets . 6-3 6.4.1 Option YWith feet / Without rack mounting brackets . 6-3 6.4.2 Anti-quake bracket (Optional Accessories) . 6-4 6.5 Option Z . 6-5 6.5.1 Option Z. 6-5 6.5.2 Option Z1. 6-5 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting

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HRX-OM-W069

Menu Various screens 6. Setting for contact output signal 4 to 6 1. Communication error (AL34) 5. Setting for contact output signal 1 to 3 Detection of contact input signal Setting for alarm (AL30 and AL31) 2. Serial communication setting 3. Analog output setting 4.

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

DOC1003626

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signal 4 to 6. (1) (2) (3) Setting for contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting for output signal 4 to 6 No.

HRX-OM-X037

6.

HRX-OM-Y098

6.

HRX-OM-W060

6.

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

HRX-OM-O021

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

Thermo-chiller/Rack Mount Type

6 !7 @0 @1 !8 No.

HRL

Standards RS-232C One thermo-chiller for one master RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 Master This product Do not connect with other pins. 5 9 6 1 D-sub 9-pin female (socket) type 334 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Optional Accessories Consumables List Part no. Description Qty.

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !