A

3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16 RCD-05 44 20 28 56 1/2-20UNF 50, 63 0~0.003 22 -0.5 ~ -03 1/2 40 20 16 RCS-05 18 28 56 1/2-20UNF 50

HRX-OM-S004

Reset the operation 1 to 9 hours (AS.31) AL40 1 Dust-proof filter maintenance OFF cumulated time for the alarm with the menu SE.30 after cleaning the filter.

HRX-OM-W032

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

HRX-OM-Q026

When the ambient Continuous monitoring temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

VM

In this case, make sure that the minimum bending radius of the rod is 10R or more. Loosen the hexagon socket head cap screw to adjust through 360.

Electric Actuators

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

CXS

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing November, 2001 D-SMC.L.A. P-80 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Electric Actuator with Integrated Guide

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

IIIIIIIIII

REGULATOR TYPE Constant Bleed, Relieving WETTED MATERIALS Polysulfone, Silicone, Stainless steel SUPPLY CONSUMPTION See Graph MAX SUPPLY 35 PSI (242 kPa) TEMPERATURE RANGE 40 150 F (4 66 C) EFFECT OF SUPPLY VARIATION < 0.02 PSI (0.14 kPa) per 1 PSI (6.89 kPa) supply change when dead-ended REPEATABILITY < +/0.05 PSI (.35 kPa) DRIFT < .03 PSI (.21 kPa) after 24 hours RECOMMENDED FILTRATION

DOC1003626

Outside of the ambient temperature range AL36 Maintenance Maintenance alarm AL37 Refrigeration Circuit Compressor circuit failure AL38 Sensor Sensor failure AL39 Controller Controller failure AL40 Compressor Inverter Compressor inverter error AL41 Compressor Inverter Comm. Compressor inverter communication error AL42 Pump Inverter Pump inverter error AL43 Pump Inverter Comm.

HRX-OM-W069

Outside of the ambient temperature range AL36 Maintenance Maintenance alarm AL37 Refrigeration Circuit Compressor circuit failure AL38 Sensor Sensor failure AL39 Controller Controller failure AL40 Compressor Inverter Compressor inverter error AL41 Compressor Inverter Comm. Compressor inverter communication error AL42 CH1 Pump Inverter CH1 pump inverter error AL43 CH1 Pump Inverter Comm.

0.5

(Rated voltage 125 V, Plug JIS C8303, Inlet IEC60320-C8) Flow rate adjustment function Nil Without flow rate adjustment function R With flow rate adjustment function Without flow rate adjustment function With flow rate adjustment function e-con connector Cartridge case Bracket IZF 10 IZF 10 IZF 10R IZF 10 IZF 10R 28 ZS C IZF 10 IZF10 A1 B1 *: 4 retaining bolts are included.

Table of Contents

MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 Pressure 0.6 MPa Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 6 6 0.4 MPa External grip 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 L Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 Pressure Pressure 0.6 MPa 0.6 MPa Gripping force

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Auto switch mounting groove 29 D9h9 0 0.036 2-4.2 209.6 4.7 32 1 4.7 3 2-3 10 (35) 8 15.5 13.4 2 2 8 0.05 0 3 0 0.02 3 0 0.02 Open: 16 Closed: 10 Dimensional Differences between MHR and MDHR Regardless of auto switch installation, some body dimensions are different. 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) A 12 12 B A 5 4.7 B 14.5 14.5 15.5 15.5 Model -10R -10E -10R -10E

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Auto switch A 12 12 B A 5 _ Model B 14.5 14.5 15.5 15.5 10R 10E 10R 10E MHR2 4.7 _ MDHR2 4 4 4 4 2.3-10 Series MHR2/MDHR2 15 Without Auto Switch: MHR2-15R P.C.D29 (Mounting thread) 3-M3 X 0.5 thread depth 6 44 42 MHR2-15E port position B 45 120 o 120 11 C A 36 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 10 M3 X 0.5 Finger opening port Finger closing port M3 X 0.5 25 o 25 o 6

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

MA DA 3 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) Model A 5 4.7 MHR3-10R MDHR3-10R 535 MHR3/MDHR3 Series Nominal Size 15 Without auto switch: MHR3-15R 3 x M3 x 0.5 thread depth 6 P.C.D.29 (Mounting thread) 120 120 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 53 34 12h9 0 0.043 1.5 5 20 43.5 (47) 2 5 6 2 3.5e8 0.020 0.038 Open: 13.5 Closed: 9.5 8 0 0.05

MXS Series Air Slide Table

Axial piping (16) MXS16P 25 62 Max. 6.5 Operating port 2-M5 X 0.8 (mm) J 62 62 62 72 87 137 185 235 Model MXS16-10R MXS16-20R MXS16-30R MXS16-40R MXS16-50R MXS16-75R MXS16-100R MXS16-125R 26 12 Dimensions not indicated are the same as basic type. 23.5 12 Dimensions not indicated are the same as basic type. 61 MXS Series Air Slide Table Dimensions MXS 20 2-M6 X 1 thread 6.5 deep Operating

MXS

MGQ MXS8-50F SMXS8, #3 MGG Axial piping (8) MXS8-llP MGC 15.5 Operating port MGF 40 Max 6.5 (mm) 2-M5 X 0.8 Model J 39 44 55 73 91 141 MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R CY1 MY1 15 6.5 * Dimensions not indicated are the same as the basic style.