Size: 3/4, Thread: M Thread, Rc(PT), Port Size: 1, Accessory: None, Option 1: Drain Cock, Option 2: Flow Direction: Right->Left

3 Port Air Operated Valve

1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-101 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 1/8, 1/4 3(R) port 18.5 11.2 30 2A NO 35 43 NC 12 3R 1P NC 1/8 12(

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

HRX-OM-S004

20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

HRX-OM-W032

For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.

Shock Absorbers and Rate Controls

(I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ? M l { x 1 . 5 J.J /A 1.2 71.4 0.9 t4.2 N/A r2.0 12.1 (r.R)0Efti.35rJr(Bl 100,6 0.7 l l 6 x 1 . 5 4.0 N/A ).2 87.4 1.2 t4.5 0.5 t4.0 12.7 l0 [.5t](B] 9E_6 I t 0,5 [!

VEX-OMO0001

P1 P1 P1 M5 -7VEX-OMO0001 (PE) Best Pneumatics No. () VEX1333-03 G36-4-01 -8VEX-OMO0001 P1 P1 02A 3R (VBA1-10) 3R () PE 3R PE 2A / (VBA1-10) P1 O PE 3R 02A 3R 2A / 2A -9VEX-OMO0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

: (J) 0.98 3.92 14.7 58.8 MX Select a model from data D of Shock Absorber (RB series) of Best Pneumatics Vol. 10.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

125

Applicable cable O.D. 3.5 to 7 78.9 Max. 10 127.6 VEX VEX 71.4 60.1 M5 (Port PE/ Pilot exhaust) Pg7 Manual override 1/8 (Port P1, P2/ Pilot air) 16.5 B A PA 128.5 R 3 87.7 P1 P1 P2 79 30 15 52.5 P 1 A 2 A 2 1731 VEX3 Series Dimensions: Base Mounted/VEX322 External pilot solenoid: VEX3221 Internal pilot solenoid: VEX3222 3 x 1/8, 1/4 [Port 1(P), 2(A), 3(R)] 23 9.5 10.5 10.5 Sol.b 3R 1P 7 PA

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Min. Dripping Flow Rate(l/min): 190, Oil Storage Capacity(cm³): 135, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 3/4, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 3/4, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 50, Accessory: Without optional

Body Size: 50, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 06 (3/4), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 50, Thread: G, Port Size: 3/4, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 50, Thread: F (G), Port Size: 06 (3/4), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

VT317-OMH0003

M4 180 4 O 9 VT317**-OMH0003-A , , [3R] *N.O.[1P] , () 10 VT317**-OMH0003-A No. 1 ISO VG 32 [3R] *N.O.[1P] 1. 2. 3. 4. 5. 6. 7. 11 VT317**-OMH0003-A A VW : LW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

Thermo-chiller

Existing model 15 10 Heating functions are required to maintain a constant temperature particularly in the winter when the ambient temperature is low. 5 0 0 5 10 15 Time [Minute] Anti-freezing function is also available!