Modular F.R.L. Unit

06 AC50, AC55, AC60 AC50B, AC55B, AC60B A Spacer width Y600 6 75.5 41 86 Part no.

PSxx-OMS0006CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= 1 -34No.PS-OMS0006CN-G [F 6] 5R.D. <> [F 6] [F 6] -35No.PS-OMS0006CN-G [F10] <> [F10] OFF 2 OUT1 [dUAL]2 [dUAL]2 () () 37 () () () 37 () [F10] -36No.PS-OMS0006CN-G <> (OFF) [F10 ] OUT1 OUT1 OFF n_1 () [F10 ] OUT1 OUT1 OUT1 n1H n1L 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 OUT1 OFF -37No.PS-OMS0006CN-G RAnG

PSxx-OMU0002CN

[F 6] 5R.D. <> [F 6] [F 6] -41No.PS-OMU0002CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] () () [dUAL] 44 () () () 44 () [F10] -42No.PS-OMU0002CN-D <> () OUT1 OUT1 OUT2 OUT2 n_1 n_2 [F10 ] () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 n1L n1H n2L n2H [F10 ] -43No.PS-OMU0002CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2 OUT2 ( ) OUT2() ( ) OUT2() OUT2 OUT1 OUT2 OFF -44No.PS-OMU0002CN-D

PSxx-OMU0005CN

[F 6] 5R.D. <> [F 6] [F 6] -42No.PS-OMU0005CN-C [F10] <> [F10] 2 OUT1 OFF OUT2 [dUAL]2 () () [dUAL]2 45 () () () 45 () [F10] -43No.PS-OMU0005CN-C <> (OFF) OUT1 n_1 OUT1 OFF OUT2 OUT2 OFF n_2 [F10 ] () OUT2 n2H OUT1 OUT2 n2L OUT1 n1L OUT1 OUT2 n1H [F10 ] -44No.PS-OMU0005CN-C 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 ( ) OUT2 OUT2 ( ) OUT2 () ( ) OUT2

PSxx-OMV0008CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -39No.PS-OMV0008CN-E [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -40No.PS-OMV0008CN-E [F10] 42 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT2) (OUT1) [dUAL]2 SET () [LinE] SET () () Line 43 () UP DOWN Line () SET , Line (SET ) SET () [dUAL]2 SET () AbY(Z) 43 () 019 ( ) UP DOWN /() SET 1

PSxx-OMV0003CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -36No.PS-OMV0003CN-G [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -37No.PS-OMV0003CN-G [F10] 39 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT1) (OUT2) [dUAL]2 SET () [LinE] SET () () 40 () UP DOWN () SET , (SET ) SET () [dUAL]2 SET () AbY(Z) 40 () 019 ( ) UP DOWN / () SET 1 () SET SET [F10

PSxx-OMU0008CN

MPa 10.0-105.0 kPa -115.0115.0 kPa -42No.PS-OMU0008CN-D [F 6] 5R.D. <> [F 6] [F 6] -43No.PS-OMU0008CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] () () [dUAL] 46 () () () 46 () [F10] -44No.PS-OMU0008CN-D <> () OUT1 OUT1 OUT2 OUT2 n_1 n_2 [F10 ] () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 n1L n1H n2L n2H [F10 ] -45No.PS-OMU0008CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2

LV50-OMQ0002

[F 81] Setting of security code complete. -53No.LV50***-OMQ0002-G [F82] Input of line names A line name can be input (up to 6 characters and/or numbers). The sub display setting can be changed to show a line name. (Refer to [F10] Selection of sub screen display on page 41.) Press the or button in function selection mode to display [F82] on the main screen.

PFxx-OMS0001CN

[F 2] OUT2 OUT1 -41No.PF-OMS0001CN-A [F 3] <> [F 3] [RES][] [rES] [] [F 3] -42No.PF-OMS0001CN-A [F10] OUT1 OUT2 OUT1 OUT2 OFF <> [F10] [SUb][] [SUb] [] [F10] -43No.PF-OMS0001CN-A <> a. 500L/min =P_1 =N_1 =P1L =P1H =N1L =N1H -44No.PF-OMS0001CN-A <()> b. 9 L 3 1.5 6 3 9 L 9 F30(49 ) + 1 =0 =0 F20(47 ) 9 L 3 1.5 6 3 9 L 6 0 0 F30(49 ) + 1 = = 47 F20 -45No.PF-OMS0001CN-A

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

LFE-OMY0008

[F 2] OUT2 39 No.LFE*-OMY0008 [F3] [F 3] [RES] [F 3] 40 No.LFE*-OMY0008 [F10] OUT1 (OUT2 ) OUT1 (OUT2 ) () OFF [F10] [SUb] OFF OFF OFF OFF [F10] 41 No.LFE*-OMY0008 (20 L/min ) (=P_1 ) (=N_1 ) (=P1L ) (=P1H ) (=N1L ) (=N1H ) 42 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) 9L3 (1.5S)6 (3S) 9L(9) () + 1 (0) 9L 3 (1.5S)6 (3S) 9L 6 0 [0] () + 1 () (=)(=) 1 / 43 No.LFE*-OMY0008 ( ( ( ( ) )

PF-OMN0011_C

ON-OFF -27No.PF-OMN0011CN-C 3. a. ([n_1]) (31 ) b. ([n1L]) [P1H] or [n1H] ([n1H]) (31 ) -28No.PF-OMN0011CN-C c. / -29No.PF-OMN0011CN-C ( [n1AH]) ( [n1dH]) 3 1 3 6 6 1 6 3 1 1 -30No.PF-OMN0011CN-C 4. OUT1 ON : ON : : : OFF : OFF : 5.

MB

Foot, Flange, Single clevis: Mounting bolts Double clevis: Clevis pin, Cotter pin Refer to page 6-6-11 for details. 6-6-24 24 Series MBK Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod Construction !0o@1 !6!9!5iq r ye@3@0t!7@2!8wu!4!3 A only MBK32 A A Width across flats CJ1 Rod view A-A' CJP A' CJ2 !2 !

10

B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

4-channel Flow Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.

PSxx-OMR0001CN

DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A G1/8 ISA-12-C CF -11No.PS-OMR0001CN-J 2 ISA-19ISA-20 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 2 30PSI0.2MPa PSI MPa 0.4MPa 0.2MPa 0.4MPa MPa/PSI 2 0.2MPa 11/8 2SI -12No.PS-OMR0001CN-J

PFxx-OMO0004CN

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

PFxx-OMJ0005CN

() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4

PFxx-OMP0001CN

[F 2] OUT2 OUT1 -40No.PF-OMP0001CN-F [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -41No.PF-OMP0001CN-F [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 90 L(9 ft 3 3 3 50 L 60,010 L 203,481,020 L (54 ) (44 ) ((46 )) -42No.PF-OMP0001CN-F [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -43No.PF-OMP0001CN-F [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20][inP] [inP