Modular F.R.L. Unit

T-interface (T) M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Factory mounting of a piping adapter on the AC models is available as a special order. Using a T-interface facilitates the redirection of air flow.

PSxx-OMS0006CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= 1 -34No.PS-OMS0006CN-G [F 6] 5R.D. <> [F 6] [F 6] -35No.PS-OMS0006CN-G [F10] <> [F10] OFF 2 OUT1 [dUAL]2 [dUAL]2 () () 37 () () () 37 () [F10] -36No.PS-OMS0006CN-G <> (OFF) [F10 ] OUT1 OUT1 OFF n_1 () [F10 ] OUT1 OUT1 OUT1 n1H n1L 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 OUT1 OFF -37No.PS-OMS0006CN-G RAnG

PSxx-OMU0002CN

NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5

PSxx-OMU0005CN

NPT1/8 4 mm 5/32 inch 6 mm () PBTCB156PPSO HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1) -

PSxx-OMV0008CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -39No.PS-OMV0008CN-E [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -40No.PS-OMV0008CN-E [F10] 42 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT2) (OUT1) [dUAL]2 SET () [LinE] SET () () Line 43 () UP DOWN Line () SET , Line (SET ) SET () [dUAL]2 SET () AbY(Z) 43 () 019 ( ) UP DOWN /() SET 1

PSxx-OMV0003CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -36No.PS-OMV0003CN-G [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -37No.PS-OMV0003CN-G [F10] 39 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT1) (OUT2) [dUAL]2 SET () [LinE] SET () () 40 () UP DOWN () SET , (SET ) SET () [dUAL]2 SET () AbY(Z) 40 () 019 ( ) UP DOWN / () SET 1 () SET SET [F10

PSxx-OMU0008CN

MPa 10.0-105.0 kPa -115.0115.0 kPa -42No.PS-OMU0008CN-D [F 6] 5R.D. <> [F 6] [F 6] -43No.PS-OMU0008CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] () () [dUAL] 46 () () () 46 () [F10] -44No.PS-OMU0008CN-D <> () OUT1 OUT1 OUT2 OUT2 n_1 n_2 [F10 ] () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 n1L n1H n2L n2H [F10 ] -45No.PS-OMU0008CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2

LV50-OMQ0002

10 A) 1/2(15 A) 3/4(20 A) 1(25 A) Weight(Body) *8 Approx. 340 g Approx. 400 g Approx. 520 g Approx. 680 g *1: Refer to page 66 [Applicable fluids list]. *2: 0L/min is displayed when the flow is less than zero-cut flow. *3: When fluids with high temperature are used, the available pressure range will be reduced.

LFE-OMY0008

10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE*-OMY0008 100200S/cm 50% () 5S/cm M12 M12 M12 M12 LFE LFE LFE LFE-1 1 1 1-A3 A3 A3 A3 AWG21 0.9 mm PVC 1.7 mm PVC 6 66 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) LFE1 LFE2 0.02 0.02 0.015 0.015 [MPa] [MPa]

PF-OMM0004_C

3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET DOWN ON/OFF -13No.PF-OMM0004-D F.S.( 1~5V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 1-5V 1-5V 4-20mA (HYS) ON OFF 90% , () () ,, ,, 10 L/min 10 L ON OFF ON OFF

PFxx-OMS0001CN

[F 2] OUT2 OUT1 -41No.PF-OMS0001CN-A [F 3] <> [F 3] [RES][] [rES] [] [F 3] -42No.PF-OMS0001CN-A [F10] OUT1 OUT2 OUT1 OUT2 OFF <> [F10] [SUb][] [SUb] [] [F10] -43No.PF-OMS0001CN-A <> a. 500L/min =P_1 =N_1 =P1L =P1H =N1L =N1H -44No.PF-OMS0001CN-A <()> b. 9 L 3 1.5 6 3 9 L 9 F30(49 ) + 1 =0 =0 F20(47 ) 9 L 3 1.5 6 3 9 L 6 0 0 F30(49 ) + 1 = = 47 F20 -45No.PF-OMS0001CN-A

PFxx-OMO0004CN

8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-

10

B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

PFxx-OMP0001CN

-2No.PF-OMP0001CN-F / 1 1.5 *3) 1 1 [] -3No.PF-OMP0001CN-F () () () N2 () -4No.PF-OMP0001CN-F () * , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000

4-channel Flow Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.

PFxx-OMJ0005CN

() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

PSxx-OMM0002CN

<> [F 8] [F 8] -32No.PS-OMM0002CN-F OUT1 AP1 (OUT1 AP1 1 AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1 AP2) OUT2 P_1H_1(n_1H_1)AP2 (OUT2 AP2 1 ) OUT2 OUT2 OUT1 OUT2 A2LA2H (A2L 1 ) P_2H_2 (n_2H_2) OUT1 P_1=A-(A-B)/4 n_1=B+(A-B)/4 A= H_1= (A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 -33No.PS-OMM0002CN-F [F 9] 30 () <> [F 9] [Eco] [F9] 30 (ON ) ON -34No.PS-OMM0002CN-F